Combined micro-accelerometer
A technology of micro-accelerometer and accelerometer, which is applied in the direction of measuring acceleration, speed/acceleration/impact measurement, measuring devices, etc., can solve the problem that micro-accelerometer cannot complete the test, and achieve high anti-overload capability, high self-detection function, Good anti-interference effect
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[0022] Embodiment: The measuring ranges of four groups of micro accelerometer units are 10g, 100g, 500g and 10000g respectively. In order to maximize the performance of the device and reduce the difficulty of design and processing, the mass block of each unit in the array is equal to the thickness of the fixed beam. The widths of the fixed beams in the 10g, 100g, 500g and 10000g micro-acceleration units are 80um, 100um, 190um, and 700um, respectively, and the lengths of the fixed beams are 650um, 650um, 500um, and 500um, respectively.
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