Composite beam piezoresistive accelerometer

A technology of accelerometer and composite beam, which is applied in the direction of acceleration measurement by using inertial force, can solve the problems of wide frequency response range, high first-order natural frequency, poor impact resistance, etc., and achieve wide frequency response range, reasonable structure, The effect of high overload resistance

Inactive Publication Date: 2007-09-12
ZHONGBEI UNIV
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Problems solved by technology

[0004] The present invention proposes a composite beam piezoresistive accelerometer in order to solve the problem that the structure of the existing high-g accelerometer

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  • Composite beam piezoresistive accelerometer
  • Composite beam piezoresistive accelerometer
  • Composite beam piezoresistive accelerometer

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Embodiment Construction

[0017] The composite beam piezoresistive accelerometer includes a silicon-based support frame 1, an elastic beam 2, and a mass block suspended in the middle of the silicon-based support frame 1 through 2 elastic beams, and a piezoresistor 3 is diffused at the end of the elastic beam 2, The bottom surface of the silicon-based supporting frame 1 is bonded with a glass bottom cover 4 by electrostatic bonding technology, and the mass block is composed of a frame body 5 and a mass core block 7 fixed in the frame body 5 through a connecting beam 6 .

[0018] During specific implementation, it is considered that: 1. The power supply of the Wheatstone bridge circuit is powered by a constant voltage source. If the resistance value is large, the power consumption is small and the temperature is not easy to rise; The piezoresistor 3 is arranged at the end of the elastic beam 2 , that is, at the intersection of the elastic beam 2 , the proof mass, and the silicon-based support frame 1 . T...

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Abstract

This invention relates to a composite beam pressure drag accelerometer; belong to micro machine electronic technology. This invention solves existing problem of that structure of high g accelerometer can not satisfy characteristic request of first order's high inherent rate, wide frequency response scope and worse shock resistance. this accelerometer includes silica-based support carriage shell, spring beam, quality piece that through spring beam overhung in middle of carriage shell, varistor diffused on tip of spring beam. Silica-based support carriage shell undersurface by electrostatic link glass bottom cap. Quality piece is composed by frame body and quality core that through bridge hooked to frame body.

Description

technical field [0001] The invention relates to micro-mechanical electronic technology, in particular to a composite beam piezoresistive accelerometer. Background technique [0002] Accelerometers are widely used in vibration and shock measurement in aerospace, electronics, automotive and mechanical fields. With the rise of the MEMS industry, accelerometers are gradually developing in the direction of miniaturization and integration. Because the micro accelerometer has the advantages of small size, light weight, low cost, low power consumption, and easy mass production, it has a wide range of military and civilian prospects. Among them, the piezoresistive accelerometer is widely used in the acceleration measurement of the shock environment because of its good linearity, simple peripheral circuit, and strong anti-overload ability. Based on the measurement requirements of different shock environments, high-g accelerometers among piezoresistive accelerometers have received ex...

Claims

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Application Information

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IPC IPC(8): G01P15/12
Inventor 刘俊石云波崔永俊李孟委杨玉华孟美玉
Owner ZHONGBEI UNIV
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