5 results about "Piezoresistive accelerometer" patented technology

The invention discloses a graphene piezoresistive accelerometer, which relates to the technical field of sensor measurement, and comprises a support frame, a central island, a plurality of metal electrodes, a plurality of groups of connecting beams, a plurality of graphene films and a plurality of mass blocks, each inner side wall of the supporting frame is connected with the outer wall of the center island through a set of connecting beams, each connecting beam comprises a sensitive beam and a plurality of supporting beams, and the mass blocks are installed on the back side of the center island, the back side of each sensitive beam and the back side of each supporting beam. All the metal electrodes and all the graphene films are installed on the front end face of the supporting frame, every two metal electrodes are connected with one graphene film, the first end of the sensitive beam is connected with the supporting frame, the graphene films are arranged corresponding to the first end of the sensitive beam, and the thickness of the first end of the sensitive beam is smaller than that of other positions of the sensitive beam. According to the invention, the sensitivity is good, the influence of the inherent frequency on the sensitivity is small, and a high G value can be realized.

The embodiment of the present disclosure provides a MEMS piezoresistive accelerometer and a preparation method, the accelerometer includes: a lower substrate; a first substrate, arranged on the lower substrate, the first substrate is provided with a cavity running through its thickness; a second substrate and a passivation layer, the second substrate is arranged on the upper surface of the first substrate, and the passivation layer is arranged on the upper surface of the second substrate; wherein the second substrate and the passivation layer corresponding to the cavity together form a sensitive beam; a piezoresistor, embedded in the second substrate; the piezoresistor is electrically connected to a frame or a mass block composed of the first substrate, the second substrate and a support frame; at least one metal electrode is arranged on the piezoresistor; an extraction electrode is arranged on the passivation layer, and the extraction electrode is electrically connected to the metal electrode; a mass block is located in the cavity, and the mass block is arranged on the lower surface of the second substrate; a permanent magnet is arranged on the mass block; a support frame is arranged on the upper surface of the second substrate; and an upper substrate is covered and placed on the upper port of the support structure.

This invention relates to the field of microelectromechanical systems (MEMS) sensor technology, and discloses a high-temperature radiation-resistant piezoresistive accelerometer chip made entirely of SiC and its fabrication method. The chip includes an upper structure, a sensitive layer structure, and a lower structure, which are stacked sequentially and connected by bonding to form a single unit, creating a sealed chamber. The sensitive layer structure includes a central mass block and four sensitive beams symmetrically arranged around it, with a Wheatstone bridge integrated on each beam. Both the upper and lower structures have bosses corresponding to the central mass block's position to limit its displacement under overload. The upper structure has a leadless electrical connection structure. All three structures are made of silicon carbide. This invention features an innovative orthogonal direction differential resistance design within a single bridge, achieving excellent temperature self-compensation and ensuring the sensor's measurement accuracy and stability across the entire temperature range.

The invention relates to the technical field of sensor measuring devices, and discloses a piezoresistive accelerometer rigidity measuring device based on a balance method, and the device comprises a pressing mechanism which is disposed on an external optical platform, and is used for driving other structural members to carry out the pressing operation; the acquisition mechanism is mounted on the external optical platform and used for acquiring experimental data, the pressing mechanism comprises a six-axis displacement table and a probe assembly, the bottom of the six-axis displacement table is mounted at the top of the external optical platform, the top of the six-axis displacement table is rotatably connected with a cross beam, and the probe assembly is mounted at the bottom of the cross beam. The measuring probe is composed of the ruby ball head probe and the cantilever-like mounting seat, meanwhile, the cross-shaped scribed line used for measurement of the laser interferometer is designed on the mounting seat, and the material characteristics of the ruby ball head probe made of stainless steel are combined, so that the problem that the measurement precision is influenced by stress deformation of the probe in the measurement process is solved, and the measurement accuracy is improved. And the precision and the accuracy of displacement measurement are greatly improved.

The invention provides a coal rock boundary bionic intelligent recognition drill bit and a coal rock boundary recognition method. The coal rock boundary bionic intelligent recognition drill bit comprises a drill bit body, a vibration sensing array and a posture sensing module. Drill teeth are equidistantly distributed along a spiral line from the top to the tail end of the drill bit main body; the vibration sensing array comprises a plurality of piezoresistive accelerometers which are equidistantly distributed along a spiral line and mounted below the corresponding drill teeth; and the attitude sensing module adopts a double-gyroscope cooperative positioning architecture and is used for resolving the actual attitude of the drill bit and positioning the boundary of the coal rock. The high-frequency vibration signals of the drill teeth in contact with the coal rock are captured in real time through the spirally-distributed vibration sensing arrays, the three-dimensional dynamic contact model is constructed in combination with the spatial positioning data of the double-gyroscope attitude module, the coal rock boundary can be recognized in the coal mining process, non-coal-mine substances such as rock walls can be avoided in time, the net coal mining rate is increased, and the coal mining efficiency is improved. And attitude calculation of the drill bit and positioning of the coal rock boundary can be realized.