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Array type single-chip integrated digital microaccelerometer

A single-chip integration, accelerometer technology, applied in the direction of using inertial force for acceleration measurement, etc., can solve the problem of large volume of the acceleration sensor, and achieve the effect of simple structure, reduced volume, and large volume.

Inactive Publication Date: 2013-01-09
ZHONGBEI UNIV
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Problems solved by technology

[0006] The present invention aims to solve the technical problem of the large size of the existing acceleration sensor. In addition, the present invention also optimizes the design of the existing accelerometer covering high and low ranges and solves the problem of high overload resistance, and provides a new type of array single chip Integrated digital micro accelerometer

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  • Array type single-chip integrated digital microaccelerometer
  • Array type single-chip integrated digital microaccelerometer

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Embodiment Construction

[0018] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0019] Such as figure 1 , 2 As shown, an array type single-chip integrated digital micro-accelerometer includes a structural layer 2 of monocrystalline silicon material; The first piezoresistive accelerometer unit 21 and the second piezoresistive accelerometer unit 22; the left side of the structural layer 2 is integrated with a CMOS circuit for amplifying and filtering the output signals of the first and second piezoresistive accelerometer units 21 and 22 The first piezoresistive accelerometer unit 21 includes a first quality block 212 placed in the structural layer 2, and the first mass block 212 is integrally formed with the structural layer 2 through four first fixed beams 211; The four first fixed support beams 211 are respectively provided with piezoresistors 20 with equal resistance and connected to form a Wheatstone bridge; the secon...

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Abstract

The invention relates to a microaccelerometer, in particular to an array type single-chip integrated microaccelerometer. The technical problems of large size of the conventional acceleration sensor, incapability of realizing the full scale output of the conventional accelerometer unit, high breakage rate of the root of a clamped beam and incapability of realizing the optimal configuration of a high-low-range accelerator are solved. The array type single-chip integrated microaccelerometer comprises a monocrystalline silicon material structural layer (2), and the structural layer (2) is divided into a left part and a right part. A first piezoresistive accelerometer unit (21) and a second piezoresistive accelerometer unit (22) are integrated on the upper and lower parts of the right part of the structural layer (2) respectively, and have different ranges. A complementary metal oxide semiconductor (CMOS) circuit for amplifying and filtering output signals of the first and second piezoresistive accelerometer units (21 and 22) is integrated on the left part of the structural layer (2). Accelerometer array units and a signal processing circuit are integrated on the same chip, so that the microaccelerometer is miniaturized and integrated.

Description

technical field [0001] The invention relates to a micro accelerometer, in particular to an array type single chip integrated digital micro accelerometer. Background technique [0002] At present, with the continuous expansion of the application range of the acceleration sensor, the requirements for the acceleration sensor are getting higher and higher, that is, miniaturization, integration, low cost, and high performance. The sensor of MEMS technology is small in size and light in weight, but the large size and low reliability of the board-level circuit used to process the output signal of the acceleration sensor cannot meet the development trend of miniaturization of MEMS devices. If the processing circuit (board-level circuit) of the sensor can be miniaturized, the volume and weight of the sensor can be greatly reduced, and the reliability of the sensor can also be improved. The micro sensor system replaces the existing sensor system and expands the application range of t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/12
Inventor 郭涛鲍爱达马喜宏杨卫李杰张晓明石云波徐香菊朱杰
Owner ZHONGBEI UNIV
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