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Silicon piezoresistive type accelerometer carrying out detection based on Josephson effect

An accelerometer and silicon piezoresistive technology, applied in the field of micro-inertial navigation, to achieve the effect of reasonable structure, high sensitivity and simple detection circuit

Active Publication Date: 2014-02-19
ZHONGBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

That is to say, there is a contradiction between high overload and high sensitivity of the silicon piezoresistive effect acceleration sensor: to achieve high overload, it is necessary to give up the detection of low g values.

Method used

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  • Silicon piezoresistive type accelerometer carrying out detection based on Josephson effect
  • Silicon piezoresistive type accelerometer carrying out detection based on Josephson effect
  • Silicon piezoresistive type accelerometer carrying out detection based on Josephson effect

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Embodiment Construction

[0031] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0032] In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right" etc. are based on the attached The orientation or positional relationship shown in the figure is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred device or element must have a specific orientation, be constructed and operated in a specific ...

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Abstract

The invention discloses a silicon piezoresistive type accelerometer carrying out detection based on the Josephson effect. The silicon piezoresistive type accelerometer carrying out detection based on the Josephson effect comprises a bonding substrate, a supporting frame body, a Josephson device, an elastic beam, a mass block and a piezoresistor. The silicon piezoresistive type accelerometer carrying out detection based on the Josephson effect has the advantages of being capable of converting acceleration signals into strictly consistently compensated current step signals by integrating the Josephson device and a silicon piezoresistive device, reasonable in structure and high in sensitivity, adopting digitized output, and being simple in detection circuit, convenient to use, good in reliability and suitable for microminiaturization, and can effectively solve the problems of low sensitivity, low effective resolution ratio, high threshold detection lower limit and the like of a high overload type sensor.

Description

technical field [0001] The invention relates to the related field of micro-inertial navigation technology, in particular to a silicon piezoresistive micro-mechanical accelerometer based on Josephson effect detection. [0002] Background technique [0003] With the development of micromechanical system (MEMS) technology, it has the characteristics of low cost, small size, easy mass production and good integration, and has attracted more and more attention from people, and has been widely used in civilian and military fields. . However, due to the limitation of key performance indicators, micromechanical sensors have not been fully applied in military, aerospace, aviation and other cutting-edge fields. Among them, sensitivity and measuring range are the key indicators for micromechanical sensors to be improved. For sensors manufactured using mainstream principles, the improvement of sensitivity depends on the reduction of structural stiffness. High sensitivity is accompanied...

Claims

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Application Information

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IPC IPC(8): G01P15/12
Inventor 李孟委王莉朱京杜康白晓晓王琪刘俊
Owner ZHONGBEI UNIV
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