Out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beam and preparation method thereof

Abstract

The invention discloses an out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beams and a preparation method of the out-of-plane piezoresistive accelerometer chip, the chip comprises two symmetrically arranged mass blocks, the outer end faces of the two mass blocks are respectively connected with a chip outer frame, and the inner end faces of the two mass blocks are connected through two groups of sensitive beams; the four sensitive beams form a Wheatstone full-bridge circuit; the mass blocks are used for directly sensing surface applied speed signals, when the chip is subjected to acceleration in the Z direction, the two mass blocks synchronously move, the two mass blocks and the sensitive beam fixed to the two mass blocks also keep synchronous movement,and therefore pure axial deformation of the sensitive beam is met.

Description

【Technical field】 [0001] The invention belongs to the field of measurement of micromechanical electronic sensors, and in particular relates to an out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beams and a preparation method thereof. 【Background technique】 [0002] With the continuous development of micromachining technology, products based on MEMS technology are more and more widely used in daily life, and MEMS sensors are mainly due to the advantages of small size, light weight, low power consumption, high reliability, and easy integration. It has become the main force of miniature sensors and is gradually replacing traditional mechanical sensors. It is widely used in various fields such as consumer electronics, automobile industry, and even aerospace, machinery, chemical industry and medicine. [0003] The working principle of the MEMS piezoresistive acceleration sensor is different from that of the strain gauge acceleration sensor. Th...

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Problems solved by technology

[0005] The object of the present invention is to overcome the shortcoming of above-mentioned prior art, provide a kind of out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beam and its preparation method; The present invention can guarantee the pure axial deformation of sensitive beam, simultaneously Through structural design, the sensitivity of the sensor is improved and the cross-sensitivity problem of the sensor is reduced

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