Out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beam and preparation method thereof

An accelerometer and axial deformation technology, applied in the direction of acceleration measurement using inertial force, impedance network, optical waveguide coupling, etc., can solve the problem of reducing sensor cross-sensitivity, etc., to reduce cross-sensitivity, ensure connection force, and improve sensitivity Effect

Active Publication Date: 2019-12-03
XI AN JIAOTONG UNIV
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Problems solved by technology

[0005] The object of the present invention is to overcome the shortcoming of above-mentioned prior art, provide a kind of out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beam and its preparation

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  • Out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beam and preparation method thereof
  • Out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beam and preparation method thereof
  • Out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beam and preparation method thereof

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Embodiment Construction

[0050] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific steps.

[0051] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, and therefore cannot be construed as limiting the present invention; the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be construed as indicating or implying relative importance; in addition, unless otherwise Clearly stipulated and limi...

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Abstract

The invention discloses an out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beams and a preparation method of the out-of-plane piezoresistive accelerometer chip, the chip comprises two symmetrically arranged mass blocks, the outer end faces of the two mass blocks are respectively connected with a chip outer frame, and the inner end faces of the two mass blocks are connected through two groups of sensitive beams; the four sensitive beams form a Wheatstone full-bridge circuit; the mass blocks are used for directly sensing surface applied speed signals, when the chip is subjected to acceleration in the Z direction, the two mass blocks synchronously move, the two mass blocks and the sensitive beam fixed to the two mass blocks also keep synchronous movement,and therefore pure axial deformation of the sensitive beam is met.

Description

【Technical field】 [0001] The invention belongs to the field of measurement of micromechanical electronic sensors, and in particular relates to an out-of-plane piezoresistive accelerometer chip with pure axial deformation sensitive beams and a preparation method thereof. 【Background technique】 [0002] With the continuous development of micromachining technology, products based on MEMS technology are more and more widely used in daily life, and MEMS sensors are mainly due to the advantages of small size, light weight, low power consumption, high reliability, and easy integration. It has become the main force of miniature sensors and is gradually replacing traditional mechanical sensors. It is widely used in various fields such as consumer electronics, automobile industry, and even aerospace, machinery, chemical industry and medicine. [0003] The working principle of the MEMS piezoresistive acceleration sensor is different from that of the strain gauge acceleration sensor. Th...

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Application Information

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IPC IPC(8): B81B7/02B81C1/00G01P15/12
CPCG01P15/12B81B7/02B81C1/00142B81B2201/0235
Inventor 赵立波马银涛于明智贾琛皇咪咪杨萍王久洪蒋庄德
Owner XI AN JIAOTONG UNIV
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