Piezoresistance type accelerometer with high g values

Abstract

The present invention relates to the technical field of the micro mechanical electronics, in particular to a piezoresistive high g-value accelerometer which resolves the problems that the structure of the existing accelerometer can not meet the demand of properties like high fixed frequencies, high flexibility and high bearing of lateral acceleration at the same time. The accelerometer comprises a Silicon-based frame, an elastic girder, and a quality block that is hung at the middle of the silicon-based frame by dint of the elastic girder; wherein, the end part of the elastic girder is provided with a voltage-dependent resistor that forms a Wheatstone bridge, the width of the elastic girder is the same with the width of the quality block, but the thickness of the elastic girder is smaller than the thickness of the quality block, the backside of the quality block is provided with a concave slot. The present invention has simple reasonable structure and good anti-overloading ability; and avoids being disabled under the circumstance of serious striking. Moreover, the production technique is quite simple, which is suitable for high-range accelerometer.

Description

technical field

[0001] The invention relates to the technical field of micromechanical electronics, in particular to a piezoresistive high-g accelerometer. Background technique

[0002] Accelerometers are widely used in vibration and shock measurement in aerospace, electronics, automotive and mechanical fields. With the rise of the MEMS industry, accelerometers are gradually developing in the direction of miniaturization and integration. Because the micro accelerometer has the advantages of small size, light weight, low cost, low power consumption, and easy mass production, it has a wide range of military and civilian prospects. Among them, the piezoresistive accelerometer is widely used in the acceleration measurement of the shock environment because of its good linearity, simple peripheral circuit, and strong anti-overload ability. Based on the measurement requirements of different shock environments, high-g accelerometers among piezoresistive accelerometers have receive...

Examples

Embodiment Construction

[0017] The piezoresistive high-g value accelerometer includes a silicon-based frame 1 fixed on a glass bottom plate 6, an elastic beam 2, and a mass block 3 suspended in the center of the silicon-based frame 1 through 2 elastic beams. There is a piezoresistor 4 forming a Wheatstone bridge, the beam width of the elastic beam 2 is equal to the width of the mass block 3, and the beam thickness of the elastic beam 2 is smaller than the thickness of the mass block 3, and the back of the mass block 3 has a groove 5 .

[0018] During specific implementation, piezoresistors 4 are respectively diffused at both ends of the elastic beam 2 (that is, piezoresistors 4 are arranged at the intersections of the elastic beam 2, the mass block 3, and the silicon-based frame body 1, and there are co-diffused piezoresistors on the four elastic beams. Eight piezoresistors), the piezoresistors 4 at both ends of the elastic beam 2 form two Wheatstone bridges connected in series respectively, as shown...

technical field

[0001] The invention relates to the technical field of micromechanical electronics, in particular to a piezoresistive high-g accelerometer. Background technique

[0002] Accelerometers are widely used in vibration and shock measurement in aerospace, electronics, automotive and mechanical fields. With the rise of the MEMS industry, accelerometers are gradually developing in the direction of miniaturization and integration. Because the micro accelerometer has the advantages of small size, light weight, low cost, low power consumption, and easy mass production, it has a wide range of military and civilian prospects. Among them, the piezoresistive accelerometer is widely used in the acceleration measurement of the shock environment because of its good linearity, simple peripheral circuit, and strong anti-overload ability. Based on the measurement requirements of different shock environments, high-g accelerometers among piezoresistive accelerometers have receive...

Examples

Embodiment Construction

[0017] The piezoresistive high-g value accelerometer includes a silicon-based frame 1 fixed on a glass bottom plate 6, an elastic beam 2, and a mass block 3 suspended in the center of the silicon-based frame 1 through 2 elastic beams. There is a piezoresistor 4 forming a Wheatstone bridge, the beam width of the elastic beam 2 is equal to the width of the mass block 3, and the beam thickness of the elastic beam 2 is smaller than the thickness of the mass block 3, and the back of the mass block 3 has a groove 5 .

[0018] During specific implementation, piezoresistors 4 are respectively diffused at both ends of the elastic beam 2 (that is, piezoresistors 4 are arranged at the intersections of the elastic beam 2, the mass block 3, and the silicon-based frame body 1, and there are co-diffused piezoresistors on the four elastic beams. Eight piezoresistors), the piezoresistors 4 at both ends of the elastic beam 2 form two Wheatstone bridges connected in series respectively, as shown...

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