Pure axial deformation based MEMS three-axis piezoresistive accelerometer chip and preparation method thereof

An accelerometer and axial deformation technology, applied in the direction of acceleration measurement using inertial force, impedance network, optical waveguide coupling, etc., can solve the problems affecting the improvement of acceleration sensor, reduce cross-sensitivity, ensure connection force, and improve output. The effect of sensitivity

Active Publication Date: 2019-12-03
XI AN JIAOTONG UNIV
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Problems solved by technology

However, there is a mutual restriction relationship between the natural frequency and the sensitivity, which affects the further improvement of the acceleration sensor.

Method used

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  • Pure axial deformation based MEMS three-axis piezoresistive accelerometer chip and preparation method thereof
  • Pure axial deformation based MEMS three-axis piezoresistive accelerometer chip and preparation method thereof
  • Pure axial deformation based MEMS three-axis piezoresistive accelerometer chip and preparation method thereof

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Embodiment Construction

[0053] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, or in a specific orientation. construction and operation, and therefore cannot be construed as limiting the present invention; the terms "first", "second", and "third" are used for descriptive purposes only, and cannot be construed as indicating or implying relative importance; in addition, unless otherwise Clearly stipulated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connectio...

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Abstract

The invention discloses a pure axial deformation based MEMS three-axis piezoresistive accelerometer chip and a preparation method thereof. An X measurement unit, a Y measurement unit and a Z measurement unit in a sensor are used for measuring the accelerations in the X direction, the Y direction and the Z direction respectively, so that the separate measurement of the accelerations in the three directions is realized; each measurement unit comprises mass blocks, a supporting beam and a sensitive beam; for no matter which of the measurement units, the supporting beam and the sensitive beam areseparately arranged through the mass blocks, the supporting beam supports the mass blocks to move, and the stress is mainly concentrated in the sensitive beam, so that the resistance value of a piezoresistor strip on the sensitive beam is changed; the supporting beam and the sensitive beam perform respective functions, so that the direct coupling relation between the sensitivity and the resonant frequency is greatly weakened; meanwhile, due to the synchronous movement of the two mass blocks, the two ends of the sensitive beam fixed with the mass blocks synchronously move, and the sensitive beam always meets the pure axial deformation condition; and under the same resonant frequency, the sensitivity of the sensor is optimal, so that the sensor chip has good performance indexes.

Description

【Technical field】 [0001] The invention belongs to the field of micromechanical electronic system sensor measurement, and in particular relates to a MEMS triaxial piezoresistive accelerometer chip with pure axial deformation and a preparation method thereof. 【Background technique】 [0002] The output of MEMS acceleration sensor is the mechanical measurement sensor second only to the pressure sensor, and it is one of the most widely used MEMS devices at present. MEMS piezoresistive acceleration sensor has simple structure, small appearance and superior performance, especially suitable for the measurement of low frequency acceleration. In addition to being used in aerospace for various overload and vibration parameter measurements such as aircraft wind tunnel tests and flight tests, it can also be used for testing vibration parameters at various stages of engine test benches in industry. [0003] There are many measurement principles used in MEMS acceleration sensors, mainly p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/12B81B7/02B81C1/00
CPCB81B7/02B81B2201/0235B81C1/00142G01P15/12
Inventor 赵立波于明智马银涛贾琛皇咪咪杨萍王久洪蒋庄德
Owner XI AN JIAOTONG UNIV
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