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A Silicon Piezoresistive Accelerometer Based on Josephson Effect Detection

An accelerometer, silicon piezoresistive technology, applied in the field of micro-inertial navigation, to achieve the effects of reasonable structure, simple detection circuit and convenient use

Active Publication Date: 2016-01-20
ZHONGBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

That is to say, there is a contradiction between high overload and high sensitivity of the silicon piezoresistive effect acceleration sensor: to achieve high overload, it is necessary to give up the detection of low g values.

Method used

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  • A Silicon Piezoresistive Accelerometer Based on Josephson Effect Detection
  • A Silicon Piezoresistive Accelerometer Based on Josephson Effect Detection
  • A Silicon Piezoresistive Accelerometer Based on Josephson Effect Detection

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Embodiment Construction

[0029] The embodiments of the present invention will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals indicate the same or similar elements or elements with the same or similar functions. The embodiments described below with reference to the drawings are exemplary, and are only used to explain the present invention, but should not be understood as limiting the present invention.

[0030] In the description of the present invention, it should be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", etc. indicate the orientation or positional relationship based on the attachment The orientation or positional relationship shown in the figure is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructe...

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Abstract

The invention discloses a silicon piezoresistive accelerometer based on Josephson effect detection, which comprises: a bonding substrate, a supporting frame, a Josephson device, an elastic beam, a quality block and a piezoresistor. The beneficial effect of the present invention is that the Josephson device is integrated with the silicon piezoresistor, the acceleration signal can be converted into a current step signal that compensates strictly and consistently, the structure is reasonable, the sensitivity is high, the digital output is simple, the detection circuit is simple, the use is convenient, and the reliability is good. Suitable for miniaturization. It can effectively solve the problems of low sensitivity, low effective resolution, and high detection threshold lower limit in high overload sensors.

Description

Technical field [0001] The present invention relates to the related field of micro-inertial navigation technology, in particular to a silicon piezoresistive micro-mechanical accelerometer based on Josephson effect detection. Background technique [0002] With the development of micro-mechanical system (MEMS) technology, which has the characteristics of low cost, small size, easy mass production and good integration, it has attracted more and more attention and has been widely used in civil and military fields. . However, due to the limitation of key performance indicators, micromechanical sensors have not been fully applied in cutting-edge fields such as military, aerospace, and aviation. Among them, sensitivity and range are the key indicators to be improved for micromechanical sensors. For sensors manufactured using mainstream principles, the increase in sensitivity depends on the reduction of structural rigidity. High sensitivity is accompanied by small range and low overload...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P15/12
Inventor 李孟委刘丽双王莉白晓晓杜康刘俊程壑薛梅靳樱子
Owner ZHONGBEI UNIV
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