Discharge lamp

Abstract

The invention provides a discharge lamp, which is provides with an electrode which is formed by that the electrode is composed of a cover part and a basic body part which is provided with a basic body part side flange part. The cover part is provided with an embedding part and a cover part mainbody which is provided with a cover part side flange part. A heat conductor is arranged in an enclosed space in the electrode; the electrode can not be damaged when the lamp is ignited and can work stably. In the electrode of the discharge lamp, the width in the radial direction of the cirque welding parts of the basic part slide flat surface and the cover side flat surface ranges from 0.8-3.0mm; furthermore, in an axial profile of the basic body part side flange part, the angle alpha of the basic body part side flange apex angle which is formed by the basic body part side flat surface and the basic body part side inclined surface is a sharp angle more than 30 DEG; in the axial profile of the cover part side flange part, the angle Beta of the cover part side flange apex angle which is formed by the cover part side flat surface and the cover part side inclined surface is a sharp angel more than 30 DEG; furthermore, the sum of the angle Alpha and the angle beta is less than 160 DEG.

Description

technical field [0001] The invention relates to discharge lamps. Background technique [0002] There are many kinds of existing discharge lamps. Among the high-pressure mercury lamps with mercury sealed in the luminous tube, especially the short-arc high-pressure mercury lamp has the luminous characteristic of emitting i-line with a wavelength of 365nm or g-line with a wavelength of 435nm, so it is used as, for example, Used as a light source for exposure equipment used for exposure processing of semiconductor wafers, liquid crystal substrates, etc. Such short-arc high-pressure mercury lamps are strongly required to increase output in order to perform desired exposure processing with high processing efficiency. [0003] Generally, the rated power is set to be large in order to make the high-pressure mercury lamp a high-output lamp, but in this case, the rated current usually also becomes large, and as a result, the following problems arise. , since the amount of electrons ...

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Problems solved by technology

[0003] Generally, the rated power is set to be large in order to make the high-pressure mercury lamp a high-output lamp, but in this case, the rated current usually also becomes large, and as a result, the following problems arise. , due to the increase in the amount of electrons colliding with the anode, it is easy to become high temperature and welded

[0013] However, it was found that in the discharge lamp having the anode of the above-mentioned structure, when the discharge lamp is started, peeling sometimes occurs at the welded part of the base part and the cover part, and during welding, the flange part of the base part and the flange part of the cover part are separated. Cracks (cracks) in the part cause the problem that the heat transfer body leaks from the closed space when the discharge lamp is turned on

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