Process for producing polycrystalline silicon bar
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- COSMOSS ENERGY JAPAN CO LTD
- Publication Date
- 2007-10-24
- Estimated Expiration
- Not applicable · inactive patent
Smart Images
Figure 1 Figure 2 Figure 3
Abstract
Description
technical field
[0001] The invention relates to a method for manufacturing polycrystalline silicon rods used in solar cells and the like. Background technique
[0002] As a conventional method for producing polycrystalline silicon ingots for solar cells, a method of melting / solidifying a silicon raw material in an argon atmosphere under reduced pressure is generally known, as in the single crystal pulling method. A melting furnace used in this conventional method will be described with reference to FIG. 2 . FIG. 2 is a schematic explanatory diagram showing an example of a conventional melting furnace. In FIG. 2 , 10 a is a melting furnace, and has a sagger 12 , a heating device 14 for heating the sagger 12 , a support device 16 for placing the sagger 12 to rotate and ascend, a heat insulating material 18 , and a vacuum chamber 20 . The heat insulating material 18 is erected on the inner side of the side wall of the vacuum chamber 20 . Ambient gas, such as argon gas, is in...