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Vaccum coating apparatus having the transmission roll for the transmission plate substrate

A technology of vacuum coating and conveying rollers, applied in the directions of vacuum evaporation coating, coating, sputtering coating, etc., to achieve the effect of easy re-installation, realization of re-installation, and avoidance of leakage positions

Inactive Publication Date: 2007-12-26
アプライドマテリアルズゲーエムベーハーウントツェーオーカーゲー
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The present invention solves the problem of providing a transport device for flat substrates in a vacuum coating plant, wherein installation of the transport device in the vacuum coating plant can be achieved without great difficulty and remove the conveying device from the vacuum coating device

Method used

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  • Vaccum coating apparatus having the transmission roll for the transmission plate substrate
  • Vaccum coating apparatus having the transmission roll for the transmission plate substrate
  • Vaccum coating apparatus having the transmission roll for the transmission plate substrate

Examples

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Embodiment Construction

[0027] FIG. 1 shows a perspective view of a part of a vacuum coating chamber 2 in a vacuum coating installation 1 . Visible are parts of two opposing walls 4 , 5 delimiting the vacuum coating chamber 2 . The conveying device 3 is located in the vacuum coating chamber 2 and comprises several conveying rollers 6, 7, 8, 9 extending in parallel. These transport rollers 6 to 9 are driven via a drive system 10 located outside the vacuum coating chamber 2 . Under the action of the drive system 10, the transport rollers 6 to 9 undergo a rotational movement about their own longitudinal axes. The substrate 11 to be coated lies on transport rollers 6 to 9 . The substrate here is a flat substrate, such as architectural glass. In order that the substrate 11 does not rest directly on the transport rollers 6 to 9 , an elastic material, for example of the rubber type, can be applied to the outer sides of the transport rollers. This serves the purpose of preventing the substrate 11 from be...

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PUM

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Abstract

The present invention relates to a vacuum covering equipment which is provided with a transmission system for the plate substrate that is transmitted through a vacuum chamber. The transmission system includes a plurality of parallel-arranged cylinders. It can provide one or a plurality of electric motors in the vacuum chamber or at the outside of the vacuum chamber as the driving mechanism of the cylinders. In any case it does the coupling between one or a plurality of motors and the cylinders by the magnetic coupling device. As there is no mechanical linking is found between the driving mechanism and the cylinders, they can easily separate from each other and it is allowed that the cylinder and the sputtering catelectrode is set can slide into or slide out the sliding element of the vacuum chamber. The cylinder coupled with the driving mechanism can be connected with other cylinder by the V-shaped strip unless each cylinder is provided with its respective driving mechanism.

Description

technical field [0001] The present invention relates to vacuum coating equipment. Background technique [0002] The coating of the substrate takes place in a vacuum coating device whereby the particles are bombarded off the target, move in the direction towards the substrate and deposit thereon. In order to achieve a uniform coating of the substrate, the substrate and the target undergo a relative movement relative to each other, preferably the substrate moves past the target. [0003] Wherein the substrate is moved by a special transfer device. [0004] If large-area and substantially rigid substrates, such as architectural glass, are to be coated, a transport system comprising different continuous transport rollers is often used. These transport rollers are interconnected via toothed belts, chains and gears and are driven by a common drive (eg by an electric motor). [0005] A drive device for a shaft is known, which is located within the treatment chamber (US 2005 / 0206...

Claims

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Application Information

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IPC IPC(8): C23C14/34H01L21/677
CPCC23C14/564C23C14/3407C23C14/56H01F7/02
Inventor 尤尔根·亨利奇安德里亚斯·绍尔哈罗德·伍斯特埃德加·哈勃科恩
Owner アプライドマテリアルズゲーエムベーハーウントツェーオーカーゲー
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