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Apparatus for manufacturing flat-panel display

A flat panel display, holder technology, used in cold cathode manufacturing, electrode system manufacturing, discharge tube/lamp manufacturing, etc., can solve problems such as increased size, non-repairable vacuum chamber, and increased vacuum chamber footprint

Inactive Publication Date: 2008-01-09
ADVANCED DISPLAY PROCESS ENG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the case where the vacuum chamber is manufactured in a single body, it is difficult to open the top of the vacuum chamber
In addition, many manual
For this reason, it is not possible to easily repair the vacuum chamber
[0012] Due to the increased size of the chamber, the footprint of the vacuum chamber in the clean room is also greatly increased

Method used

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  • Apparatus for manufacturing flat-panel display
  • Apparatus for manufacturing flat-panel display
  • Apparatus for manufacturing flat-panel display

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0049] 3 is a front view showing a separable vacuum chamber included in the FPD manufacturing apparatus according to the first embodiment of the present invention. 4a and 4b are enlarged views respectively corresponding to part "A" of Fig. 3 . Although the illustrated vacuum chamber may be applied to any one of the load lock chamber, the feed chamber, and the processing chamber, for convenience of description, the following description will be given only in connection with the application of the vacuum chamber to the load lock chamber.

[0050] As shown in FIG. 3, the detachable vacuum chamber according to the present embodiment represented by reference numeral 100 includes: a top plate 110 and a bottom plate 120, the top plate 110 and the bottom plate 120 face each other to define the top and the bottom of the chamber 100, respectively; and a peripheral wall plate 130 coupled to the top plate 110 and the bottom plate 120 at upper and lower ends, respectively. There are exten...

no. 2 example

[0063] According to the present embodiment, at least one of the load lock chamber, the feed chamber, and the processing chamber constituting the FPD manufacturing apparatus has a vertically stacked chamber structure including at least two subchambers each using various protrusions / The groove structure is coupled with each other. According to the present embodiment, it is possible to provide an FPD manufacturing apparatus capable of achieving optimum space efficiency and thus cost reduction and increase in productivity while obtaining desired rigidity of the stacked chamber. Therefore, the present embodiment meets the recent demand for the development of FPD manufacturing equipment capable of manufacturing large-sized FPDs while exhibiting an increase in productivity without an increase in mounting area due to an increase in the size of the FPD manufacturing equipment.

[0064] Although the stack chamber according to the present embodiment is applicable to any one of the load ...

no. 3 example

[0078] According to the present embodiment, there is provided a vacuum chamber having a detachable structure for easy manufacturing, transportation, and repairing processes, which is used for manufacturing the FPD. For a separable structure, the vacuum chamber comprises a chamber shell which is divided into at least two parts. In this way, the separable vacuum chamber is formed by assembling the chamber housing part together with the components provided in the vacuum chamber.

[0079] Although the separable vacuum chamber according to the present embodiment is applicable to any one of the load lock chamber, the feed chamber, and the processing chamber, for convenience of description, the following description will be given only in connection with an example of applying the separable vacuum chamber to the feed chamber.

[0080] Preferably, the separable vacuum chamber according to the present embodiment is applied to the feed chamber 200 for feeding substrates between the load ...

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Abstract

An flat-panel display (FPD) manufacturing apparatus which has a configuration capable of easily processing large-size substrates while achieving easy manufacturing, transporting, operating, and repair processes.

Description

[0001] This application is a divisional application of the Chinese invention patent application No. 200510008749.1 and titled "Equipment for Manufacturing Flat Panel Display" filed on February 25, 2005. technical field [0002] The present invention relates to an apparatus for manufacturing flat panel displays, and more particularly, to an apparatus for manufacturing flat panel displays having settings suitable for performing required processes for large-sized substrates. Background technique [0003] Referring to FIG. 1 , there is shown a general flat panel display (FPD) manufacturing apparatus, which is used to manufacture FPDs, such as liquid crystal displays and plasma display panels (PDPs). As shown in FIG. 1 , an FPD manufacturing apparatus denoted by reference numeral 1 includes a load lock chamber 100 , a feed chamber 200 and a process chamber 300 , which are connected in series. Gate valves G are provided between adjacent chambers to independently maintain the vacuu...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/00H01L21/67G02F1/1333H01J9/00G09F9/00B01J3/00B01J3/03G02F1/13
CPCG02F1/1303H01L21/67201H01L21/67207
Inventor 李荣钟崔浚泳曹生贤尹炳五金敬勋郑洪基
Owner ADVANCED DISPLAY PROCESS ENG CO LTD