Two-channel sonic surface wave gas sensors having humidity compensate function

A gas sensor, humidity compensation technology, used in the analysis of fluids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, instruments, etc. The same problem, to achieve good environmental stability, reduce the gap, increase the effect of humidity compensation function

Inactive Publication Date: 2008-03-05
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

But it is obvious that since the sensitive film is coated on the measurement channel but not on the reference channel, the humidity sensitivity characteristics of the two channels are different, and the conventional dual-channel structure does not have the function of humidity compensation

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  • Two-channel sonic surface wave gas sensors having humidity compensate function
  • Two-channel sonic surface wave gas sensors having humidity compensate function

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Embodiment Construction

[0020] The present invention will be further described below in conjunction with the accompanying drawings.

[0021] As shown in FIG. 2 , the surface acoustic wave gas sensor includes: a piezoelectric substrate 1 , interdigital electrodes 2 , a sensitive film 3 , and a humidity compensation film 4 . There are two groups of electrodes 2, which respectively constitute two transmission channels of the surface acoustic wave, and the electrodes 2 are prepared on the surface of the piezoelectric substrate 1 by photolithography technology. A sensitive thin film is coated on one of the surface acoustic wave channels to form a measurement channel, while a humidity compensation film is coated on the other channel to form a reference channel.

[0022] The preparation method of the dual-channel surface acoustic wave gas sensor with humidity compensation function provided by the present invention is as follows (example):

[0023] The piezoelectric substrate 1 chooses ST-quartz; a layer of...

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Abstract

The invention comprises a piezoelectric baseboard and two pairs of interdigital electrodes; said interdigital electrodes are located on the piezoelectric baseboard to construct both parallel acoustic surface wave measuring channel and reference channel. It features the following: coating a sensitive film on the measuring channel; coating a temperature compensation film on the reference channel.

Description

technical field [0001] The invention relates to the technical field of gas sensors, in particular to a dual-channel surface acoustic wave gas sensor with a humidity compensation function. Background technique [0002] The surface acoustic wave gas sensor is made by attaching a chemically sensitive film on the acoustic channel of the surface acoustic wave device. It has high sensitivity and small detection limit, and is especially suitable for the detection of low-concentration trace atmosphere. However, the surface acoustic wave device itself is very sensitive to changes in external factors, such as temperature, humidity, pressure, etc. In order to eliminate the influence of these factors on gas measurement, a dual-channel structure is usually used to compensate. The conventional dual-channel structure is shown in Figure 1, which is to prepare two identical interdigital electrodes along the same direction on the same piezoelectric substrate, thus forming two SAW channels. A...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N29/02G01N29/32
Inventor 杜晓松蒋亚东胡佳谢光忠刘忠祥
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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