Two-channel sonic surface wave gas sensors having humidity compensate function
A gas sensor, humidity compensation technology, used in the analysis of fluids using sonic/ultrasonic/infrasonic waves, material analysis using sonic/ultrasonic/infrasonic waves, instruments, etc. The same problem, to achieve good environmental stability, reduce the gap, increase the effect of humidity compensation function
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[0020] The present invention will be further described below in conjunction with the accompanying drawings.
[0021] As shown in FIG. 2 , the surface acoustic wave gas sensor includes: a piezoelectric substrate 1 , interdigital electrodes 2 , a sensitive film 3 , and a humidity compensation film 4 . There are two groups of electrodes 2, which respectively constitute two transmission channels of the surface acoustic wave, and the electrodes 2 are prepared on the surface of the piezoelectric substrate 1 by photolithography technology. A sensitive thin film is coated on one of the surface acoustic wave channels to form a measurement channel, while a humidity compensation film is coated on the other channel to form a reference channel.
[0022] The preparation method of the dual-channel surface acoustic wave gas sensor with humidity compensation function provided by the present invention is as follows (example):
[0023] The piezoelectric substrate 1 chooses ST-quartz; a layer of...
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