Apparatus for suppling chemical agent supply
A supply device and liquid medicine technology, applied to the surface coating liquid device, optics, instruments, etc., can solve the problems of product quality reduction, work efficiency reduction, etc., to improve production efficiency, reduce production costs, and facilitate the use of liquid medicine The effect of supplementary work
Active Publication Date: 2011-01-26
WEIHAI DMS OPTICAL ELECTROMECHANICAL CO LTD +1
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Problems solved by technology
[0009] Second, when the chemical solution in the chemical solution supply unit decreases, after confirming the reduced amount, it is necessary to manually replenish the reduced chemical solution, so there is a problem that the work efficiency is reduced
[0010] Third, when using a pump to supply the chemical solution from the chemical solution supply unit, since the suction direction of the pump is upward, the foam accumulated on the upper part of the chemical solution (liquid surface) may flow into the nozzle before the chemical solution. Therefore, the chemical solution is supplied in a state containing foam, which will lead to a decrease in product quality
Method used
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[0027] Next, a chemical solution supply device provided in a coating device according to an embodiment of the present invention will be described in detail with reference to the drawings.
[0028] As shown in FIGS. 1 and 2 , a chemical solution supply device 1 of a coating device according to an embodiment of the present invention is installed on one side of a table M. As shown in FIG. The workbench M is constructed with a conventional structure, and it is equipped with a conventional conveying device M1 such as a conveying roller, thereby conveying the substrate G, and performing the coating operation of photosensitive chemical liquid W such as photoresist during the conveying process.
[0029] The chemical liquid supply device 1 of the coating device sprays the chemical liquid W onto the substrate G conveyed by the conveyance device M1 to perform a coating operation.
[0030] The chemical solution supply device 1 of the coating device includes: a frame F; a nozzle 2 disposed...
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The invention relates to a medical liquid supplying device, comprising a nozzle provided with an outlet through which the medical liquids fed to a substrate; and a medical liquid supplying unit which can be upward-downward movably arranged on the upper part of the nozzle and used for supplying the medical liquid to the nozzle. The feeding amount of the medical liquid is adjusted by adjusting the height difference between the medical liquid supplying unit and the nozzle. The medical liquid supplying device also comprises a sensor for detecting the liquid level of the stored medical liquid and opening or closing the valve according to the liquid level. The medical liquid supplying unit also comprises a discharge unit for discharging the surplus medical liquids to outside when the medical liquid level reaches a certain level. Besides, the medical liquid supplying unit is arranged on the upper part of the nozzle, and needs no other blowing and suction device as the medical liquid supplying unit supplies the medical liquid through the height difference, thereby reducing the production cost. Besides, as the medical liquid supplying unit is arranged on the upper part of the nozzle and used for supplying medical liquid to the lower part, the invention can prevent the foams from flowing into the medical liquid supplied to the nozzle maximally, thereby increasing the production efficiency.
Description
technical field [0001] The present invention relates to a chemical solution supply device, and more particularly to a chemical solution supply device capable of easily supplying a chemical solution to a nozzle through an improved structure. Background technique [0002] In general, in a production process of a flat panel display substrate, photolithography is widely used as a method of forming a predetermined pattern on the surface of the substrate. [0003] In the above method, before exposing, developing, and etching, the coating operation of photosensitive chemical solution (hereinafter referred to as chemical solution) such as photoresist with a predetermined thickness is carried out on the surface of the substrate. [0004] A nozzle is used in the coating operation described above, and the nozzle uses a slit nozzle to spray the chemical liquid supplied from the chemical liquid supply device onto the substrate. [0005] The liquid medicine supply device includes a liqui...
Claims
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IPC IPC(8): G03F7/16B05C5/00B05C11/10
CPCB05C11/1026G03F7/16G03F7/7085H01L21/6715
Inventor 金银洙闵天基朴庸硕
Owner WEIHAI DMS OPTICAL ELECTROMECHANICAL CO LTD