X-Y-Z three freedom degree tandem type nanometer grade microposition workstation

A degree of freedom and serial technology, applied to the parts of the instrument, instruments, shells, etc., can solve the problems of three degrees of freedom parallel coupling control difficulties and achieve high resolution effects
CN101286369AInactive Publication Date: 2008-10-15上海青客时尚生活服务股份有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
上海青客时尚生活服务股份有限公司
Publication Date
2008-10-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a serially-connected nano-scale micro positioning workbench which has X-Y-Z three-dimensional freedom degrees and comprises a base, a movable platform, an X-directional displacement amplifier, a Y-directional displacement amplifier and a Z-directional displacement amplifier; furthermore, the base, the Z-directional displacement amplifier, the Y-directional displacement amplifier, the X-directional displacement amplifier and the movable platform are sequentially connected into a serially-connected structure, and the displacements are respectively controlled between the freedom degrees; wherein, the X-directional displacement amplifier and the Y-directional displacement amplifier have the same structure. The serially-connected nano-scale micro positioning workbench has compact structure and large delivery stroke range, one point on the movable platform can reach any point in the delivery stroke range, and the serially-connected nano-scale micro positioning workbench can be applied to various occasions with strict space restriction and larger displacement requirement.
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Description

technical field

[0001] The invention relates to a workbench mechanism for micro-positioning and micro-operation in micro-mechanical technology, in particular to an X-Y-Z three-degree-of-freedom serial nano-scale micro-positioning platform, which can be applied to the fields of electronic device manufacturing, biomedicine, precision measurement and the like. Background technique

[0002] Micro-positioning and micro-manipulation technology is an important research content of MEMS technology, which can provide necessary technology and equipment for nano-measurement, nano-manipulation and nano-assembly. At present, there are already many micro-positioning workbenches, most of which use piezoelectric ceramics (PZT) as drivers. Piezoelectric ceramics have many advantages such as high rigidity, large output thrust, fast frequency response, high displacement resolution and precision, etc., but the output per unit length The displacement is small, so the stroke of the table driven by...

Claims

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