Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor
A technology for detecting sensors and detecting signals, which is applied in the direction of instruments, measuring devices, surveying and mapping, and navigation, etc., and can solve the problems of performance degradation of vibration-type inertial force detection sensors
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[0026] Hereinafter, one embodiment of the present invention will be described using the drawings.
[0027] figure 1 It is a block diagram showing a vibration-type angular velocity sensor as an example of the vibration-type inertial force detection sensor of the present invention. Its basic structure includes: a sensor element 103 ; a drive control circuit 104 that controls the vibration of the sensor element 103 ; and a detection circuit 105 that processes the signal output from the sensor element 103 .
[0028] figure 2 It is a plan view showing the detailed structure of the sensor element 103 used in the vibration-type angular velocity sensor of this embodiment.
[0029] Such as figure 2 As shown, in the sensor element 103, on a pair of driving arms 114 extending from a tuning fork vibrator 113 made of a silicon substrate, a driving electrode 101a serving as a driving part 101 and a detecting electrode 102a serving as a detecting part 102 are provided respectively, Th...
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