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Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor

A technology for detecting sensors and detecting signals, which is applied in the direction of instruments, measuring devices, surveying and mapping, and navigation, etc., and can solve the problems of performance degradation of vibration-type inertial force detection sensors

Active Publication Date: 2011-03-23
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the smoothing circuit 221 of the low-pass filter 209 cannot perform high-precision smoothing processing, and as a result, there is a problem that the performance of the vibration-type inertial force detection sensor is reduced due to the internal processing of the detection circuit 205.

Method used

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  • Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor
  • Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor
  • Method for processing detection signal of vibratory inertial force sensor and vibratory inertial force sensor

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Embodiment Construction

[0026] Hereinafter, one embodiment of the present invention will be described using the drawings.

[0027] figure 1 It is a block diagram showing a vibration-type angular velocity sensor as an example of the vibration-type inertial force detection sensor of the present invention. Its basic structure includes: a sensor element 103 ; a drive control circuit 104 that controls the vibration of the sensor element 103 ; and a detection circuit 105 that processes the signal output from the sensor element 103 .

[0028] figure 2 It is a plan view showing the detailed structure of the sensor element 103 used in the vibration-type angular velocity sensor of this embodiment.

[0029] Such as figure 2 As shown, in the sensor element 103, on a pair of driving arms 114 extending from a tuning fork vibrator 113 made of a silicon substrate, a driving electrode 101a serving as a driving part 101 and a detecting electrode 102a serving as a detecting part 102 are provided respectively, Th...

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Abstract

A method for processing detection signal of a vibratory inertial force sensor and a vibratory inertial force sensor employing that method, the method for processing detection signal enhancing detection precision of the vibratory inertial force sensor. In the detection system circuit of the vibratory inertial force sensor, harmonic components are removed from a synchronous detection signal and then the signal from which the harmonic components are removed is amplified and smoothed.

Description

technical field [0001] The invention relates to a detection signal processing method of a vibration-type inertial force detection sensor and a vibration-type inertial force detection sensor using the method. Background technique [0002] For example, as an example of a conventional vibration-type inertial force detection sensor, a vibration-type angle sensor such as Image 6 As shown in the block diagram, it has: a sensor element 203, which is provided with a drive part 201 and a detection part 202; a drive control circuit 204, which applies a control voltage to the drive part 201, makes the sensor element 203 vibrate, and controls the vibration; The detection circuit 205 processes the detection signal output from the detection unit 202 . In the detection circuit 205, the detection signal output from the detection unit 202 is differentially amplified using the differential amplifier 206, and the differentially amplified signal and the signal obtained by inverting the detecti...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P9/04G01C19/56G01C19/5614G01C19/5621
CPCG01C19/5614G01C19/5607G01C19/56
Inventor 植村猛
Owner PANASONIC CORP