Packaging body

A packaging body and packaging box technology, applied in packaging, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problems of large packaging body size, large storage space, reuse or recycling obstacles, etc., to achieve expansion of storage space, The effect of improving strength or rigidity and suppressing surrounding contamination

Inactive Publication Date: 2008-11-19
SHIN-ETSU POLYMER CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these cushioning materials may increase the size of the package due to their high bulk density.
Moreover, since the end of the cushioning material is easily damaged, there is a problem that the chipped pieces due to the damage will contaminate the clean room of the factory.
[0011] Furthermore, since the contact area and volume of the cushioning member and the package or the substrate storage container are large, vibrations are easily transmitted, and as a result, there is also a problem that the semiconductor wafer housed in the container body will rotate inadvertently.
Furthermore, since the buffers cannot be stacked, a large storage space is required, which may hinder reuse or recycling

Method used

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Examples

Experimental program
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no. 6 approach

[0093] then, Figure 12 The sixth embodiment of the present invention is shown. In this case, the substrate storage container 10 is not a front-opening cassette type in which semiconductor wafers W with a diameter of 300 mm are arranged and stored, but a top-opening cassette type in which semiconductor wafers W with a diameter of 200 mm are arrayed and stored. type.

[0094] This type of substrate storage container 10 includes: a substantially bottomed square cylindrical container body 11A; an inner box 26 that is detachably accommodated in the container body 11A from above and accommodates a plurality of semiconductor wafers W in a row via an arrangement groove; The upper lid 15A of the opening of the container body 11A is opened and closed via the ring-shaped packing 27 . Inside the cover body 15A, an elastic pressure plate 28 for holding the upper peripheral edge of each stored semiconductor wafer W is attached. The description of other parts is omitted since they are the...

Embodiment 1

[0102]The package of Example 1 is the type of the first embodiment. The substrate storage container was a front-opening cassette type in which 25 silicon wafers with a diameter of 300 mm were stored, and was packaged with the lid facing upward. In addition, the package body of Example 2 is the type of 2nd Embodiment, and a board|substrate storage container is the same as Example 1. In addition, the package body of Example 3 is the type of 3rd Embodiment, and a board|substrate storage container is the same as Example 1.

[0103] On the other hand, the package of the comparative example is a type in which a pair of reinforcement members are removed from the type of the third embodiment, and the substrate storage container is the same as that of the first embodiment.

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Abstract

A packaging body that is suitable for transporting contents such as a substrate receiving container, that is not large in size, that has less possibility of contaminating the surroundings, that does not require an increased storage space, and that is less likely to cause problems when reused or recycled. The packaging body has a rectangular tube-like packaging box (1) with the bottom; an upper and lower pair of shock absorbing bodies (30) received in the packaging box (1) while holding the substrate receiving container (10); an elastic body (50) interposed between the substrate receiving container (10) and each shock absorbing body (30); and a reinforcement body (60) for reinforcing each shock absorbing body (30). The shock absorbing body (30) is prepared as a shock absorbing member (31) fitted to the substrate receiving container (10), and a peripheral wall (32) of the shock absorbing member (31) is constructed from an inner wall (35) formed in a bent manner at the peripheral edge of the shock absorbing member (31), a projection (36) formed at and projecting from the inner wall (35), and an outer wall (37) formed at the projection (36) and facing the inner wall (35) of the shock absorbing member (31) with a spacing in between. The reinforcement body (60) is formed to have a substantially dish-shaped cross-section, and a bent peripheral edge section (61) of the reinforcement body is fitted and engaged from the outside to an outer wall end section (37a) of the shock absorbing member (31).

Description

technical field [0001] The present invention relates to a package used when packaging contents including a substrate storage container and the like. Background technique [0002] In recent years, the mainstream of semiconductor wafers is not 200 mm (8 inches) in diameter but 300 mm (12 inches) in diameter, and a large dedicated substrate storage container is required for transporting this type of wafer. Although not shown in the figure, this substrate storage container actually includes a front-opening box-shaped container body for accommodating a plurality of semiconductor wafers, and a front cover for opening and closing the opening of the container body, and is packaged in a package. Transport (see Patent Documents 1 and 2). [0003] The lid body is formed in, for example, a horizontally long rectangle, and a substantially rectangular front holder for elastically holding the semiconductor wafer accommodated in the container body is longitudinally attached to the concave ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65D85/86B65D81/107B65D77/26H01L21/673
CPCH01L21/67369B65D77/26B65D81/107B65D85/00H01L21/673
Inventor 恩田武宽中村诚也
Owner SHIN-ETSU POLYMER CO LTD
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