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Method of lifting off and fabricating array substrate for liquid crystal display device using the same

A technology of substrates and grooves, which is applied in semiconductor/solid-state device manufacturing, photolithography on patterned surfaces, and optics, and can solve problems such as deteriorating image display quality

Active Publication Date: 2011-05-04
LG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the non-display area has a relatively large width, the PR pattern and the material layer of the pixel electrode remain, thereby deteriorating the image display quality

Method used

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  • Method of lifting off and fabricating array substrate for liquid crystal display device using the same
  • Method of lifting off and fabricating array substrate for liquid crystal display device using the same
  • Method of lifting off and fabricating array substrate for liquid crystal display device using the same

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Embodiment Construction

[0042] Figure 4 is a plan view showing a part of a line according to the invention comprising grooves, while Figures 5A-5C is a cross-sectional view, shown taken from the Figure 4 The manufacturing process of the site in the line V-V.

[0043] like Figure 4 As shown, a plurality of first trenches 172 and a plurality of second trenches 174 are formed on line 170 . Each of the first groove 172 and the second groove 174 has a strip shape or a rectangular shape. The line 170 may be one of a common connection line, a gate pad, a data pad, an electrostatic protection circuit line, an MPS line, and a dummy line. Line 170 has a relatively large width. For example, line 170 has a width greater than about 200 microns. A plurality of first trenches 172 are arranged in a first row and spaced apart from each other. A plurality of second trenches 174 are arranged in a second row and spaced apart from each other. After the line 170 is formed through the lift-off process, the pass...

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Abstract

The present invention relates a method of lifting off and fabricating array substrate for liquid crystal display device using the same. The method of lifting off includes forming a first material layer on a substrate; forming a photoresist pattern including first and second holes and on the first material layer; patterning the first material layer using the photoresist pattern as a patterning mask to form a material pattern having first and second grooves within the material pattern, the first and second grooves corresponding to the first and second holes, respectively; forming a second material layer on an entire surface of the substrate including the photoresist pattern and the first and second grooves; and removing the photoresist pattern and the second material layer on the photoresist pattern at the same time, wherein a portion of the material pattern between the first and second grooves and portions of the material pattern at sides of the first and second grooves constitute a line as a whole.

Description

technical field [0001] The present invention relates to a liquid crystal display device, and more particularly to a peeling method and a method for manufacturing an array substrate for a liquid crystal display (LCD) device thereby, which can prevent deterioration of image quality. Background technique [0002] A related art liquid crystal display (LCD) device uses optical anisotropy and polarization properties of liquid crystal molecules. As a result of its thin and long shape, the liquid crystal molecules have a defined alignment direction. The alignment direction of the liquid crystal molecules can be controlled by applying an electric field to the liquid crystal molecules. In other words, when the strength or direction of the electric field is changed, the alignment of the liquid crystal molecules is also changed. Due to the optical anisotropy of the liquid crystal molecules, incident light is refracted based on the orientation of the liquid crystal molecules, so that i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/42H01L21/84G02F1/1362
CPCG03F7/422H01L21/0272
Inventor 郭喜荣洪玄硕林周洙金泓植
Owner LG DISPLAY CO LTD
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