Rock quartz micro mechanical gyroscope based on shear stress detection and method for making same

Abstract

The invention relates to a quartz micromechanical gyroscope which is based on the shear stress detection and a manufacturing method. The quartz micromechanical gyroscope comprises a support quality block, a first cantilever beam, a second cantilever beam, a first driving beam, a second driving beam, four movable quality blocks, a driving electrode and a detection electrode; the first cantilever beam and the second cantilever beam are symmetrically arranged on both ends of the support quality block; the support quality block is connected with the first driving beam through the first cantileverbeam; the support quality block is connected with the second driving beam through the second cantilever beam; the arrangement direction of the first driving beam and the second driving beam is perpendicular to the arrangement direction of the first cantilever beam and the second cantilever beam; and the four movable quality blocks are respectively fixed at the end parts of the first driving beam and the second driving beam. The invention provides the quartz micromechanical gyroscope which is based on the shear stress detection and has the advantages of simple and compact structure, low cost, simple manufacture process, high sensitivity and strong anti-interference ability and the manufacturing method.

Description

technical field [0001] The invention mainly relates to the field of microelectromechanical systems, in particular to a quartz micromechanical gyroscope based on shear stress detection and a manufacturing method thereof. Background technique [0002] Compared with traditional gyroscopes, quartz micromechanical gyroscopes manufactured using micromechanical technology have the advantages of small size, light weight, low cost, high reliability, and mass production, and can be widely used in aviation, aerospace, weapons, automobiles, etc. , medical, consumer electronics and other fields have huge market potential and have become an important direction for the development of inertial gyroscopes. At present, micro-mechanical gyroscopes of various structures emerge in endlessly in the world, and their common feature is that there are two vibration directions perpendicular to each other, namely, the vibration excitation direction and the detection vibration direction caused by Coriol...

AI Technical Summary

Problems solved by technology

However, the detection electrodes of these structures need to make two separate electrodes on the side wall of the detection beam, which will lead to a complicated electrode manufacturing process, and the unbalanced positive and negative electrodes have a great influence on the zero bias of the gyroscope.

The detection vibration of these structures has pressure film damping, which makes the quality factor very low, which limits the improvement of the sensitivity of the micromachined gyroscope.

Images