Laser processing device and laser processing method

Abstract

The invention relates to a laser processing device and laser processing method which can ensure the prescribed irradiating area for continuous use even under the condition of processing the object incapable of voiding tiny lenses with abnormal movement. The laser processing device comprises a space adjusting element comprises of a plurality of small movable elements for irradiating the object to be processed with laser beams from laser source in the predicted shape; an objecting optical system configured at the position conjugate with the space adjusting element and the object to be processed; an unit for controlling action of the space adjusting element according the irradiating area set before the irradiation; an unit detecting small movable elements with abnormal actions in the small movable elements which construct the space adjusting element; and an unit for controlling the areas having no detected abnormal actions to repeatedly irradiate the object to be processed when the position of the small movable elements having detected abnormal actions overlaps the irradiating area.

Description

technical field [0001] The present invention relates to a laser processing device represented by a digital micromirror device using a spatial modulation element such as a microlens array, and in particular to extracting a defect region on a substrate by imaging in the process of manufacturing a substrate such as a liquid crystal display device, according to the A laser correction device that corrects the shape of the defect area. Background technique [0002] Conventionally, there is known a laser processing apparatus that switches the laser beam irradiated to the workpiece by a plurality of microscopic mirrors, and performs processing by changing the range and pattern of the irradiated laser beam. [0003] In such a laser processing device, since a high-output laser beam is irradiated on the surface of a micro-lens having a small area, the micro-lens tends to deteriorate over time, and once the micro-lens deteriorates, for example, the mirror surface of the micro-lens is in...

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Problems solved by technology

[0008] However, in the laser processing apparatus using the existing microlens array as described above, once the number of degraded elements increases and degraded elements are produced throughout the entire surface of the DMD, even if the microlens array is slid, sometimes the degraded elements cannot be avoided. For processing, the laser processing device will be stopped at this time, and the laser processing device cannot be used until the new microlens array is replaced. Therefore, for example, when the laser processing device is used in the production line of the processed object, the production line must be stopped. question

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