High output power two-dimension micro-driver apparatus based on sonic surface wave

Abstract

The invention relates to a high output power two-dimensional micro actuator device based on acoustic surface wave in the technical field of micro-electro-mechanical system. The high output power two-dimensional micro actuator device comprises an upper plate, a large permanent magnet, four adjusting bolts, a small permanent magnet, a slide block, a two-dimensional drive platform and a lower plate, wherein, four adjusting bolts are distributed and fixed symmetrically towards the central connection line of the upper plate and the lower plate and adjusts the upper plate and the lower plate; the large permanent magnet is fixed exactly under the upper plate; the small permanent magnet is fixed on the slide block; the slide block is arranged on the lower plate; four sets of interdigital electrode pairs are symmetrically distributed on the two-dimensional drive platform; alternating current excitation with resonant frequency is loaded on the interdigital electrode pairs and can realize the drive towards the slide block arranged on the interdigital electrode pairs; and four adjusting bolts are adjusted to control the distance between the upper plate and the lower plate to adjust the volume of repulsion force between the large permanent magnet and the small permanent magnet and accordingly realize the adjustment of preload force. The high output power two-dimensional micro actuator device can not only realize two-dimensional drive, but also realize large preload force and accordingly realize higher output power.

Description

technical field [0001] The invention relates to a micro-driver in the field of micro-electromechanical technology, in particular to a two-dimensional micro-driver device with high output power based on surface acoustic waves. Background technique [0002] The research on the application of surface acoustic devices to drivers began in the 1980s. The specific principle is as follows: when a periodic alternating voltage is applied to the piezoelectric substrate, an alternating electric field is established in the substrate. This excites periodic elastic vibrations in the substrate and forms periodic elastic waves. When a slider is placed on the surface and a preload force is added, the slider will produce regular displacement due to the effect of friction, that is, the driving effect will be realized. At present, the step amplitude of the surface acoustic wave driving device has been precisely controlled to the nanometer level, which can be widely used in precise transportati...

AI Technical Summary

Problems solved by technology

This design realizes two-dimensional driving, but the disadvantage is that the magnetic field generated by the energized solenoid is relatively weak, and it cannot achieve a large preload force, thus limiting the increase in output power

This design achieves a large output power, but it is only one-dimensional drive, not two-dimensional drive

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