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Torsion resilient element for hanging micromechanical elements which can be suspended and deflected

A torsion spring and micro-mechanical technology, applied in the field of torsion spring components, can solve problems such as changing deflection, and achieve the effect of increasing manufacturing costs

Active Publication Date: 2012-12-05
FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Thus, a small change in the drive frequency in this range results in a rather large change in the deflection

Method used

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  • Torsion resilient element for hanging micromechanical elements which can be suspended and deflected
  • Torsion resilient element for hanging micromechanical elements which can be suspended and deflected
  • Torsion resilient element for hanging micromechanical elements which can be suspended and deflected

Examples

Experimental program
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Embodiment Construction

[0033] In the following, by means of the Figures 1 to 7 An example to schematically explain the present invention.

[0034] therefore, figure 1 Eight examples of possible embodiments for examples of torsion spring elements (torsion spring elements) according to the invention are shown.

[0035] In this respect, there is a rectilinear region oriented along the longitudinal axis in all examples except the example shown on the right in the lower row. The examples shown in the upper row have prongs / branches at the end faces, which are V-shaped or U-shaped.

[0036] The examples shown in the lower row have prongs / branches at both end faces, each of which may have a different design, or their length along the longitudinal axis is different.

[0037] The rightmost example shown in the lower row is formed by two forks / branches directly connected to each other, one made U-shaped and the other V-shaped.

[0038] figure 2 Four other examples are shown. In the two upper examples, ...

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PUM

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Abstract

The invention relates to torsion spring elements for the suspension of deflectable micromechanical elements such as reflecting elements pivotable around a rotational axis. It is therefore the object of the invention to provide torsion spring elements for suspensions of deflectable micromechanical elements which can achieve improved properties in operation with respect to known spring elements. Torsion spring elements in accordance with the invention are made so that they have a changing geometrical design in the direction of their longitudinal axis and thereby have non-linear spring characteristics. The longitudinal axis is in this respect aligned between a clamping or support and the deflectable micromechanical element which is held by at least one torsion spring element. In this respect, a torsion spring element in accordance with the invention can have a straight-line region, which is aligned in the direction of the longitudinal axis, and a fork / branching at at least one end face into which the straight-line region merges.

Description

technical field [0001] The invention relates to a torsion spring element for suspending a deflectable micromechanical element such as a reflective element pivotable about an axis of rotation. As such, the pivoting can take place in an oscillating manner between two reversing points with a predetermined angle of rotation. This pivoting movement can be driven electrostatically, or in a manner known per se using different physical principles. Background technique [0002] In order to keep the energy required for driving as low as possible, such systems are often driven while maintaining resonance. At this point, attention must be paid to the natural resonance of the system. It depends on several parameters. In addition to its own weight, the spring characteristics and the corresponding deflection of the spring element must also be taken into account. When the drive power is constant, when the drive uses the resonant frequency, much greater deflection can be obtained than wh...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B3/00
CPCB81B2203/0109B81B3/0078B81B2201/042
Inventor 亚历山大·沃尔特克里斯蒂安·德拉贝托马斯·克洛泽
Owner FRAUNHOFER GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG EV