Electrostatic driving MEMS deformable mirror based on lever amplification principle

Abstract

The invention discloses an MEMS deformable mirror based on lever amplification principle, comprising at least two lever amplification electrostatic drivers, at least two articulated beams, at least one supporting structure and a mirror surface; the lever amplification electrostatic drivers are connected with the supporting structure via the articulated beam, the supporting structure is connected with the mirror surface via a connector, and the lever amplification electrostatic drivers are composed of an anchor point, a cantilever beam, an upper pole plate and a lower pole plate, the long arm thereof is connected with the articulated beam, the short arm thereof acts on the upper pole plate, and the anchor point and the lower pole plate are fixed on the same plane. The electrostatic drivingMEMS deformable mirror based on lever amplification in the invention not only has the advantages of common MEMS apparatuses, which has small volume and light weight, has no hysteresis effect, and canrealize array and mass production, but also reduces the influence of electrostatic drawing-in phenomenon by lever amplification, improves stroke and can be widely used in the field of adaptive optics.

Description

technical field [0001] The invention relates to the technical field of micro-opto-electromechanical systems, in particular to a MEMS deformable mirror based on a lever magnification principle suitable for an adaptive optical system. Background technique [0002] In the field of adaptive optics, electrostatically driven MEMS deformable mirrors have the advantages of small size, low power consumption, fast response, mass production, and good compatibility with integrated circuits, so they are favored in adaptive optics systems. The existing electrostatically driven MEMS deformable mirrors are generally electrostatically attractive, and voltage is applied to the upper and lower plates to make the upper plate move downwards, and the mirror surface is displaced by a support column. Electrostatically attracted MEMS deformable mirrors are generally works on this principle. However, the disadvantage of this electrostatically attracted MEMS deformable mirror is that the upper and lo...

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved in the present invention is: aiming at the deficiencies of the prior art, an electrostatically driven MEMS deformable mirror based on the principle of lever amplification is designed, which can amplify the relatively small stroke of the electrostatic driver through the lever structure, thereby reducing The limit of the electrostatic pull-in effect is improved, and the travel of the deformable mirror is improved

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