Sensing device

A technology of detection device and measuring part, applied in impedance network, piezoelectric device/electrostrictive device, material selection for piezoelectric device or electrostrictive device, etc., to achieve high-precision effect

Inactive Publication Date: 2009-09-09
NIHON DEMPA KOGYO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, with this method, noise of two frequencies is superimposed on the frequency signal extracted by the heterodyne detector, and it is not suitable for measuring a small amount of detection objects with a high-resolution measuring device, and it is difficult for an actual device. method used

Method used

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Embodiment Construction

[0043] Next, an embodiment in which the detection device of the present invention is applied as a detection device for living things will be described. First, the overall structure of the detection device will be briefly described. Such as figure 1 As shown, the detection device includes a plurality of, for example, eight crystal sensors 1 , an oscillation circuit unit 31 to which these crystal sensors 1 can be detachably mounted, and a measuring instrument main body 4 connected to the oscillation circuit unit 31 .

[0044] Such as figure 1 and figure 2As shown, the crystal sensor 1 includes a wiring board such as a printed circuit board 21 . In this printed circuit board 21 , a rubber sheet 22 is superimposed on the surface side of the printed circuit board 21 where the opening 23 a is formed, and the rubber sheet 22 is provided with a concave portion 23 . On the lower surface side of the rubber sheet 22, a portion corresponding to the recess 23 protrudes, and the prot...

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Abstract

A sensing device comprising a sensor which has an absorbing layer formed on the surface of the sensor to adsorb an object to be sensed and a sensing piezoelectric vibrator having a natural frequency variable when the object is adsorbed. The deterioration of the measurement accuracy due to variation of the frequency of the piezoelectric vibrator because of a factor other than the adsorption of the object is prevented. The sensing device comprises a reference sensor having a reference piezoelectric vibrator to which an object to be sensed is not adsorbed, a reference oscillating circuit for oscillating the reference piezoelectric vibrator, a measuring section for receiving the oscillation output of a sensing oscillation circuit and the oscillation output of the reference oscillation circuit in time series and measuring the frequencies of the oscillation outputs of the oscillation circuits, and data creating means for creating time-series data on the difference between the frequency of the sensor and that of the reference sensor according to the measured frequencies of the oscillation outputs of the oscillation circuits. Therefore, the frequency variation due to a factor other than the adsorption of the object is cancelled.

Description

technical field [0001] The present invention relates to a detection device which uses a piezoelectric vibrator, such as a crystal vibrator, whose natural frequency changes due to the adsorption of the detection object on the surface of which is formed with an adsorption layer for absorbing the detection object. According to the natural frequency of the piezoelectric vibrator Detect the object to be detected. Background technique [0002] As a device for detecting trace substances, a detection device using a crystal resonator is known. The detection device forms a crystal sensor on the surface of the crystal vibrator with an adsorption layer for absorbing the object to be detected. , In detail, when it is attached to the adsorption layer, its natural frequency changes according to the amount of its adhesion. The detection device has the following advantages: its application range is wide, its structure is simple as a device, and its sensitivity is high. Can measure. [000...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N5/02H01L41/08H01L41/18H03H9/19
CPCH03H9/19G01N5/02
Inventor 若松俊一小山光明茎田启行
Owner NIHON DEMPA KOGYO CO LTD
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