Unlock instant, AI-driven research and patent intelligence for your innovation.

Method of controlling electron beam focusing of pierce type electron gun and control device therefor

A control method and technology of a control device, applied in the direction of electrode device and related parts, parts of discharge tube/lamp, circuit, etc.

Inactive Publication Date: 2011-09-21
ULVAC INC
View PDF3 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, the influence of the space charge effect inside the electron gun still exists and is not perfect

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method of controlling electron beam focusing of pierce type electron gun and control device therefor
  • Method of controlling electron beam focusing of pierce type electron gun and control device therefor
  • Method of controlling electron beam focusing of pierce type electron gun and control device therefor

Examples

Experimental program
Comparison scheme
Effect test

no. 1 example

[0120] First, an example of a 30 kW Pierce electron gun will be described. like figure 2 As shown, thermocouples R1 and R2 are directly installed on the anode 39 of the cathode chamber 31 and the fluid regulator 43 of the swing chamber 32 . In addition, if figure 1 As shown, a turbomolecular pump 51 with an exhaust velocity of 800 liters / second is installed in a vacuum exhaust system 49 through an isolation valve 56 . The turbomolecular pump 51 uses a rotational speed controllable (rotational speed is controlled to change the exhaust speed) pump. In the embodiment, figure 2 The temperature of the fluid regulator 43 obtained by the thermocouple R2 is fed back to the rotational speed of the turbomolecular pump 51 . Image 6 and Figure 7 show result. It can be seen that even if the pressure on the side of the irradiation chamber 2 changes, the beam focusing state is constant and the temperature of the fluid regulator 43 is also constant ( Image 6 ). In addition, even...

no. 2 example

[0124] Next, use image 3 , 4 and 13, an embodiment of a 100 kW electron gun having a second focusing coil, a second fluid regulator and a differential exhaust system is described. also, Figure 4 A vacuum exhaust system and a differential exhaust system not shown in the figure are respectively connected to the exhaust port 64 and the exhaust port 65 .

[0125] The preferred thermocouple temperature measurement location is Figure 4 The thermocouple R4 of the intermediate chamber 62 provided on the ring 74a on the outlet side of the first fluid regulator 73a, or the thermocouple R5 provided on the ring 74b of the inlet of the second fluid regulator 73b. Alternatively, it may be the thermocouple R2 of the first fluid regulator 73a or the thermocouple R6 of the second fluid regulator 73b. In addition, the rings 74a and 74b are auxiliary parts provided in the fluid regulator for adjusting pressure. also, image 3 The differential exhaust cylinder 44a and Figure 13 The ape...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

In the control of electron beam focusing of a pierce-type electron gun, any influences from the space charge effect and space charge neutralizing action within the electron gun are eliminated to attain complete control of an electron beam. Feedback control of the pressure within the electron gun is performed by directly measuring temperature at an internal of the pierce-type electron gun. It is desirable that locations where the direct measurement of the temperature at the internal of the electron gun is performed are an anode (39) and a flow register (43). Further, the direct measurement canbe performed at any one of a ring, an aperture and an exhaust pipe provided at an outlet or an inlet of any one of a cathode chamber (31), an intermediate chamber, and a scanning chamber (33). Accordingly, all of stabilization of beam producing area (optimized design of electron gun itself), stabilization of beam transporting portion and stabilization of beam using portion have become appropriate.

Description

technical field [0001] The present invention relates to a control method of a Pierce electron gun capable of stably maintaining an electron beam for a long time, an electron beam control device of the Pierce electron gun, and a vacuum device equipped with the same. Background technique [0002] The Pierce electron gun has the characteristics of separating the beam generating source from the vacuum atmosphere of the irradiated object, and stably maintaining the beam generating source. In addition, because the energy source is electrons, it is easy to swing and deflect, so it is widely used as a heating source for vapor deposition equipment, melting furnaces, and heat treatment furnaces. Especially for MgO and SiO that require long-term stability of more than 300 hours 2 The heating source of the tandem evaporation device for metal oxides such as metal oxides; the coil-type evaporation that can be heated to a specified evaporation rate in a short time, and needs to make the t...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/06H01J37/04
CPCH01J37/07H01J2237/182H01J3/026H01J37/06H01J37/304H01J2237/004H01J37/04H01J29/51
Inventor 饭岛荣一沈国华佐竹彻
Owner ULVAC INC