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Piezoelectric micro-blower

A blower, miniature technology, applied in mechanical equipment, engine components, machines/engines, etc., can solve problems such as poor heat exchange efficiency, and achieve the effect of increasing flow

Active Publication Date: 2009-09-23
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, when using the gas flow generator as a cooling fan for a heat source such as a CPU, since the hot air around the heat source is blown onto the heat source as it is, the air can only be stirred, and the heat exchange efficiency is poor.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021]

Figure 2 to Figure 5 The first embodiment of the piezoelectric micro blower according to the present invention is shown. The piezoelectric micro blower A of this embodiment is an example used as a cooling blower for electronic equipment, and the top plate (second wall portion) 10, flow path forming plate 20, and partition plate (second wall portion) are stacked and fixed sequentially from top to bottom. 1 wall) 30, blower housing 40, diaphragm 50 and bottom plate 60. The outer peripheral portion of the diaphragm 50 is bonded and fixed between the blower case 40 and the bottom plate 60 . The members 10, 20, 30, 40, 60 other than the diaphragm 50 constitute the blower body 1 and are formed of a rigid flat material such as a metal plate or a hard resin plate.

[0022]

The top plate 10 is formed with a quadrangular flat plate, such as Figure 5 As shown, a discharge port (second opening) 11 penetrating from the front to the back is formed at the center thereof.

[...

Embodiment 2

[0042]

Figure 9 A second embodiment of the piezoelectric micro blower according to the present invention is shown. The parts that are the same as those in the first embodiment are assigned the same symbols and will not be described again. In the piezoelectric micro-blower B of this embodiment, as the piezoelectric element, a ring-shaped piezoelectric element 52a having a hollow in the center is used, and the outer peripheral portion of the piezoelectric element 52a is placed close to the outer peripheral portion of the diaphragm 50b. Components of body 1.

[0043]

Figure 10 Displacement in the tertiary resonance mode of the diaphragm using a disk-shaped piezoelectric element and a ring-shaped piezoelectric element is shown. When using the disc-shaped piezoelectric element 52, as shown in (a), the piezoelectric element is attached to a position of 6 mm from the center position (position of 0 mm). When the ring-shaped piezoelectric element 52b is used, as shown by (b),...

Embodiment 3

[0047]

Figure 11 ~ Figure 13 A third embodiment of the piezoelectric micro blower according to the present invention is shown. The parts that are the same as those in the first embodiment are assigned the same symbols and will not be described again. In the piezoelectric micro blower D of the present embodiment, a quadrilateral central space 23 serving also as an inflow channel is formed in the central portion of the flow channel forming plate 20 . Central space 23 has an opening area wider than hollow portion 41 of blower housing 40 constituting blower chamber 4 . Notches 33, 43, 63, and 51b are respectively formed at two opposite corners of the partition plate (first wall portion) 30, the blower housing 40, the bottom plate 60, and the diaphragm 50, and these notches are connected to the center. The corners of the space 23 correspond, and these notches constitute the inlet 8 . In addition, a notch 64 is formed on the bottom plate 60 . This is used as a ventilation gro...

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PUM

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Abstract

A piezoelectric micro-blower capable of efficiently conveying a compressive fluid without the use of a check valve and achieving a sufficient flow rate. A first wall section (1a) and a second wall section (1b) are provided in a blower body (1), and openings (5a, 5b) are formed at those positions of the wall sections that face the center of a diaphragm (50). An inflow path (7) for interconnecting the openings (5a, 5b) and the outside is formed between both wall sections. When a voltage is applied to a piezoelectric element (3) to vibrate the diaphragm (50), that portion of the first wall section (1a) that is in the periphery of the opening (5a) vibrates. This causes gas to be drawn from the inflow path (7) and discharged from the opening (5b).

Description

technical field [0001] The present invention relates to piezoelectric micro-blowers suitable for conveying compressive fluids such as air. Background technique [0002] Piezoelectric micropumps are widely used in cooling water delivery pumps for small electronic devices such as notebook computers, fuel delivery pumps for fuel cells, and the like. On the other hand, a piezoelectric micro-blower can be used as a blower for blowing air instead of a cooling fan such as a CPU or for supplying oxygen necessary for power generation by a fuel cell. Piezoelectric micropumps and piezoelectric microblowers are both pumps (blowers) that use a diaphragm that bends and deforms when a voltage is applied to a piezoelectric element, and have the advantages of simple structure, thin configuration, and low power consumption. [0003] When conveying incompressible fluids such as liquids, check valves made of soft materials such as rubber or resin are usually installed at the inlet and ou...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04B45/047F04B45/04
CPCF04B43/046F04B53/1077F04B45/04F04B45/047F04B53/10F04B53/06F04B53/16F05B2210/12F04B2201/0806Y10S417/00
Inventor 平田笃彦神谷岳和田宽昭须永绿金井俊吾
Owner MURATA MFG CO LTD
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