Magnetic recording medium, method of manufacturing the same, and magnetic recording apparatus
A technology of a magnetic recording medium and a manufacturing method, which is applied in the directions of magnetic recording, data recording, and record carrier manufacturing, etc., and can solve the problems of deterioration of the magnetic recording medium, collision of magnetic heads, influence, etc.
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example 1
[0067] Using the stamper, press Figures 2A to 2J shown method to fabricate DTR media, wherein the stamper is formed as figure 1 Servo patterns (preamble, address, burst) and land and valley patterns of the recording track are shown. Specifically, during the filling process of the non-magnetic material 55 ( Figure 2F ), deposited Ni with a thickness of 50nm under high pressure (7.0Pa) 60 Nb 25 Ti 15 film as a multi-element amorphous alloy. During the etch back process ( Figure 2G ), using an ECRU ion gun to apply Ar ions for 1 minute at 800W microwave power and 500V accelerating voltage. These procedures were repeated 5 times.
[0068] At this stage, an atomic force microscope (AFM) is used to measure the surface of the media. As a result, Ra was 1.478 nm, showing a smooth surface. The track pitch was confirmed to be 190nm, the depth of the pits was about 5nm, and the surface was successfully planarized.
[0069] Therefore, by using a multi-element amorphous alloy ...
example 2
[0074] The DTR medium was fabricated in the same manner as in Example 1, except that the non-magnetic material filling process and etch-back process were repeated 96 times. That is, during the filling process of the non-magnetic material 55 ( Figure 2F ), deposited Ni with a thickness of 50nm under high pressure (7.0Pa) 60 Nb 25 Ti 15 membrane. During the etch back process ( Figure 2G ), using an ECRU ion gun to apply Ar ions for 1 minute at 800W microwave power and 500V accelerating voltage. These procedures were repeated 96 times.
[0075] At this stage, AFM is used to measure the surface of the medium. As a result, it was confirmed that a very smooth surface was formed. In the glide test, noise was observed, but no signal peaks due to defects were observed. A laser Doppler vibrometer (LDV) is used to measure the flying height of the magnetic head. As a result, no head drop was observed. If there is a depression with a depth of 10 nm on the surface, the head drop...
example 3
[0077] Using the stamper, press Figures 2A to 2J shown method to fabricate DTR media, wherein the stamper is formed as figure 1 Servo patterns (preamble, address, burst) and land and valley patterns of the recording track are shown. Specifically, during the filling process of the non-magnetic material 55 ( Figure 2F ), a NiNbTiHf film with a thickness of 50 nm was deposited as a multi-element amorphous alloy under high pressure (7.0 Pa). During the etch back process ( Figure 2G ), using an ECRU ion gun, applying Ar ions for 1 min at 800W microwave power and 500V accelerating voltage. These processes are repeated multiple times.
[0078] At this stage, an atomic force microscope (AFM) is used to measure the surface of the medium. As a result, it was found that, as in Example 1, Ra was small.
[0079] The non-magnetic material used to fill the recesses between the magnetic patterns is preferably a multi-element containing Ni or Co and two or more metals selected from Ta...
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Abstract
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