High-speed automatic detector of microscopic pinhole defect in chromium plate film
A micro-defect, automatic inspection technology, applied in the direction of instruments, scientific instruments, measuring devices, etc., can solve the problems of high labor intensity, poor reliability, complex structure, etc., and achieve the effect of good effect, convenient maintenance and simple operation
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[0011] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.
[0012] Referring to the accompanying drawings, this embodiment includes a frame 1, a platen 2 fixed on the frame 1, a transparent glass substrate 12 is fixed on the platen 2, and an LED point light source I13-1 and an LED point source are arranged below the glass substrate 12. Light source II13-2; an XY-axis robot composed of Robot X-axis 5 and Robot Y-axis 6 is installed on the platen 2, X-axis 5 and Y-axis 6 are superimposed at an angle of 90°, and the effective motion stroke of the XY-axis robot can cover The entire maximum chrome plate width, Y-axis 6 is equipped with fine-tuning device I8-1, fine-tuning device II8-2, horizontal fine-tuning device III8-3 and cantilever 11, and the upper part of fine-tuning device I8-1 is equipped with a 3.5 times to 22.5 times adjustable lens I9-1 and high-speed 31fps 2 million pixel CCD camera I10-1 with the highes...
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