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Etching liquid for flat panel display

A flat panel display and etchant technology, applied in the field of etchant for flat panel displays, can solve the problems that citric acid does not improve the wettability, it is difficult to obtain the edge shape of the pattern, and the fineness of the display pixels is not enough, so as to achieve good wettability , non-volatile, high etching precision effect

Active Publication Date: 2009-11-25
HEFEI MAOTENG ENVIRONMENTAL PROTECTION TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On this basis, Japanese Patent Laid-Open No. 10-130870 discloses an etching solution composition formed by using citric acid instead of acetic acid in mixed acids, but since citric acid does not have the effect of improving wettability, it is difficult to obtain fine patterns Edge shape, resulting in insufficient fineness of display pixels
In Chinese patent CN1511338A, a kind of etching solution composition containing perfluoroalkyl phosphoric acid compound, oxalic acid and water is proposed. Using this etching solution composition, ITO transparent electrodes can be etched with good precision, and it is not easy to Generate residue, but the patent does not give an etching rate

Method used

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  • Etching liquid for flat panel display
  • Etching liquid for flat panel display
  • Etching liquid for flat panel display

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] Taking the glass substrate as an example, the ITO glass substrate is processed as follows according to the conventional method, and the desired image can be obtained on the glass substrate:

[0027] 1) Cleaning and drying;

[0028] 2) Use Freehand software to design graphics, the width of microchannel graphics is designed to be 80um, and laser high-resolution printing masks are used for backup;

[0029] 3) Place the glass substrate sheet in a KW-4A glue homogenizer, and evenly coat a layer of photoresist at a glue speed of 3500r / min;

[0030] 4) Dry and cool the coated glass sheet to room temperature for use. Place the mask on a glass slide protected by photoresist, and expose it with a 500W UV light source for 25sec;

[0031] 5) Throwing the exposed glass substrate coated with photoresist into a developing solution until the exposed part of the photoresist completely falls off, rinsed with distilled water, and dried to obtain the desired image;

[0032] 6) The devel...

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Abstract

The present invention discloses an etching liquid for the flat panel display. The etching liquid comprises oxalic acid, trifluoromethyl benzenesulfonic acid and water. The using amount of the oxalic acid is 1-10% of the total weight of the etching liquid. The using amount of the trifluoromethyl benzenesulfonic acid is 0.5-5% of the total weight of the etching liquid, and the balance is water. The invention provides the etching liquid for the flat panel display, which has the advantages of high efficiency, high etching precision and no pungent odour. The etching liquid is used for etching the ITO transparent conductive film. The adopted oxalic acid and the trifluoromethyl benzenesulfonic acid are organic acids. The compound composed of the two organic acids is not easily volatilized and has excellent wetting quality. When used as the ITO conductive film etching liquid, the etching liquid compound has the characteristics of excellent etching performance, no residue, less environmental pollution, etc.

Description

technical field [0001] The invention relates to an etchant for flat panel display. Background technique [0002] In the field of flat panel display, including plasma display (PDP), liquid crystal display (LCD) and organic electroluminescence (OLED) in the preparation process, usually use indium tin oxide (ITO) as the conductive film, because the ITO film has low Resistivity, high visible light transmittance, firm and hard film layer, excellent properties such as alkali resistance, heat resistance and humidity resistance. During the preparation process, in order to obtain the required fine images of various pixels, it is necessary to etch the transparent conductive film formed by ITO. [0003] At present, the ITO etching method used in the field of flat panel display is mainly wet etching, and the commonly used solutions are various acid solutions. As pointed out in the book "Liquid Crystal and Flat Panel Display Technology" (Beijing University of Posts and Telecommunicatio...

Claims

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Application Information

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IPC IPC(8): C03C15/00
Inventor 冯卫文
Owner HEFEI MAOTENG ENVIRONMENTAL PROTECTION TECH CO LTD
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