Treatment technology of accompanying gas in production process of trichlorosilane

An associated gas and production process technology, applied in the directions of halogenated silanes, halogenated silicon compounds, combined devices, etc., can solve the problems of polluted air and associated gas emissions, and achieve the effect of reducing pollution and production costs.
CN101633504AInactive Publication Date: 2010-01-27洛阳世纪新源硅业科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
洛阳世纪新源硅业科技有限公司
Publication Date
2010-01-27
Estimated Expiration
Not applicable · inactive patent
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Abstract

The invention relates to a treatment technology of accompanying gas in production of trichlorosilane, comprising the steps of removing dust, washing, precipitating, separating gas, absorbing, and treating waste gas. The technical solution of the invention purifies discharged waste gas, reduces the pollution to the air, reuses the waste and reduces the production cost.
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Description

Technical field

[0001] The invention relates to a gas treatment process, in particular to a treatment process of associated gas in the production process of trichlorosilane. Background technique

[0002] At present, in the process of silicon tetrachloride (SiCl4) to produce trichlorosilane (SiHCl3), the associated gas contains silicon powder, hydrogen chloride, hydrogen and other substances, which directly emits not only a waste of resources but also pollutes the air. Summary of the invention

[0003] In order to solve the problem of air pollution caused by the emission of associated gases, the present invention proposes a process for treating associated gases in the production of trichlorosilane.

[0004] The technical scheme of the present invention: ①Dust removal: the associated gas during the production of trichlorosilane is recovered and reused in the dust removal equipment to preliminarily purify the associated gas; ②Leaching: In a two-stage leaching tower, under high temperat...

Claims

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