Test method of micro-accelerometer reliability intensifying test

A micro-accelerometer, accelerometer technology, applied in the direction of speed/acceleration/shock measurement, speed/acceleration/shock measurement equipment testing/calibration, measurement device, etc., can solve the lack of reliability indicators of MEMS devices and cannot meet the reliability requirements verification, etc.

Inactive Publication Date: 2010-02-03
ZHONGBEI UNIV
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Problems solved by technology

At present, due to the complexity and particularity of MEMS reliability and the lack of research on the reliability of micro-devices by researchers, the reliability indicators of MEMS de

Method used

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Experimental program
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Embodiment Construction

[0069] Micro accelerometer reliability strengthening test test method, the test steps are as follows:

[0070] 1. Intensified test steps of micro accelerometer under temperature stress:

[0071] a. According to the operating temperature range of the micro-accelerometer to be tested (the operating temperature range is the temperature parameter range calibrated by the manufacturer for the micro-accelerometer), set the starting temperature for warming up, the starting temperature for cooling down, and the temperature change ΔT, 1°C ≤ ΔT ≤ 5°C, the starting temperature for temperature increase is lower than the upper limit of the operating temperature range, and the starting temperature for cooling down is greater than the lower limit of the operating temperature range;

[0072] b. Steps of temperature-increasing enhanced test: place the micro-accelerometer to be tested in the high and low temperature test chamber, and set the inside of the chamber to a state of zero humidity and ...

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Abstract

The invention relates to a test method of an MEMS type sensor-micro-accelerometer, in particular to a test method of micro-accelerometer reliability intensifying test. The method can find out the failure mode of the micro-accelerometer under the integrated stress environment of temperature, vibration and wetness, is convenient for product development, and improves the integrated capability of theproduct, comprising the following steps: 1. the intensifying test of the micro-accelerometer under temperature stress; 2. the intensifying test of the micro-accelerometer under the integrated stress of the temperature and the vibration; and 3. the he intensifying test of the micro-accelerometer under the integrated stress of the temperature, the vibration and the wetness. The method considers theaffect of the temperature, the vibration and the wetness to the inner stricture of the micro-accelerometer. By applying three stress-the temperature, the vibration and the wetness to the micro-accelerometer step by step, the method finds out the condition of the three stress before the micro-accelerometer function is invalid and when the micro-accelerometer function is invalid, so as to be convenient for solve the defect of the micro-accelerometer, improve the integrated capability and the reliability of the micro-accelerometer, and is good for developing new products-the micro-accelerometer with high reliability.

Description

technical field [0001] The invention relates to a testing method of a micro-accelerometer, a MEMS sensor, in particular to a micro-accelerometer reliability strengthening test testing method that takes into account the three stresses of temperature, vibration and humidity. Background technique [0002] With the progress of the society and the development of the country, the international competition is deepening and fierce. The market has higher and higher requirements for products, which require both high performance and high reliability. That is to say, during the entire use process of the product, it is necessary to ensure that the performance of the product is stable within the design life period. At present, due to the complexity and particularity of MEMS reliability and the lack of research on the reliability of micro-devices by researchers, the reliability indicators of MEMS devices are lacking; at the same time, due to the particularity of micro-inertial devices, con...

Claims

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Application Information

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IPC IPC(8): G01P21/00
Inventor 马喜宏熊继军张文栋刘俊秦丽石云波周鹏斌
Owner ZHONGBEI UNIV
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