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Excimer lamp

An excimer lamp and discharge vessel technology, applied in the field of excimer lamps, can solve problems such as the destruction of the discharge vessel 61, and achieve the effects of preventing the destruction of the discharge vessel, preventing damage, and reducing ultraviolet strain

Active Publication Date: 2010-03-03
USHIO DENKI KK
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the accumulated strain caused by the stress concentration makes the edge portions 64a, 64b, 64c, and 64d the starting point of damage, causing a problem that the discharge vessel 61 is broken.

Method used

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  • Excimer lamp
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Examples

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Embodiment Construction

[0023] figure 1 It is an explanatory sectional view showing a schematic configuration of an example of the excimer lamp 10 of the present invention, figure 1 (a) is a cross-sectional view showing a section along the longitudinal direction of the discharge vessel 11, figure 1 (b) means figure 1 (a) A-A line sectional view.

[0024] The excimer lamp 10 is equipped with a discharge vessel 11 having a rectangular cross-section and a hollow elongated discharge vessel 11 whose both ends are hermetically sealed and a discharge space S is formed inside. There is xenon. Here, the enclosing amount of xenon gas is such that the pressure is within a range of, for example, 10 to 60 kPa.

[0025] The discharge vessel 11 is made of silica glass such as synthetic quartz glass that transmits vacuum ultraviolet light well, and also functions as a dielectric.

[0026] In discharge vessel 11, long side surfaces 12a, 12b made of long plate glass are arranged to face each other, and short ...

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Abstract

An excimer lamp comprises a discharging container provided with a tube having a rectangular section, which can prevent the edge portion from being a broken starting point to cause the discharging container broken. The excimer lamp (10) generates excimer discharge in a discharging space (S) of the discharging container (11), in a section cut parallelly to the end surfaces (14a, 14b), compared withthe edge portions (16a, 16b, 16c, 16d) connected with the long edge surfaces (12a, 12b) and the short edge surfaces (13a, 13b), the central portion (18a, 18b) of the long edge surfaces (12a, 12b) of the discharging container (11) bends toward the inner side of the discharging space (S), the surface exposed in the discharging space (S) of the discharging container (11) is provided with an ultraviolet reflecting film (20), and the film thickness of the ultraviolet reflecting film (20) at the edge portion side is thicker than that of the central portion.

Description

technical field [0001] The present invention relates to an excimer lamp, in which a discharge gas is excited through a pair of electrodes facing a discharge vessel made of silica glass, and the silica glass forming the discharge vessel between the pair of electrodes, An excimer discharge occurs inside the capacitor. Background technique [0002] In recent years, the following technology has been developed and put into practical use: irradiating vacuum ultraviolet light with a wavelength of 200nm or less on the object to be treated made of metal, glass and other materials, thereby detoxifying Treatment of the object to be processed, such as cleaning treatment technology to remove organic pollutants attached to the surface of the object to be processed, or oxide film formation treatment technology to form an oxide film on the surface of the object to be processed. [0003] Among these devices, there is known an excimer lamp that uses light as a light source for irradiating va...

Claims

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Application Information

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IPC IPC(8): H01J65/00H01J61/33H01J61/35
CPCH01J5/50H01J9/247H01J61/305H01J61/35H01J65/046
Inventor 藤泽繁树平石隆之
Owner USHIO DENKI KK
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