Excimer lamp

An excimer lamp and discharge vessel technology, applied in the field of excimer lamps, can solve problems such as the destruction of the discharge vessel 61, and achieve the effects of preventing the destruction of the discharge vessel, preventing damage, and reducing ultraviolet strain

Active Publication Date: 2010-03-03
USHIO DENKI KK
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the accumulated strain caused by the stress concentration makes the edge portions 64a, 64b

Method used

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  • Excimer lamp
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Examples

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Example Embodiment

[0023] figure 1 Is an explanatory cross-sectional view showing the schematic configuration of an example of the excimer lamp 10 of the present invention, figure 1 (a) is a cross-sectional view showing a cross section along the longitudinal direction of the discharge vessel 11, figure 1 (b) means figure 1 (a) A-A sectional view.

[0024] This excimer lamp 10 includes a discharge vessel 11 having a rectangular cross-section and a hollow long-length discharge vessel 11 airtightly sealed at both ends and a discharge space S is formed inside. The discharge vessel 11 is enclosed as a discharge gas There is xenon. Here, the enclosed amount of xenon gas is such that the pressure is in the range of, for example, 10 to 60 kPa.

[0025] The discharge vessel 11 is made of silica glass that transmits vacuum ultraviolet light well, for example, synthetic silica glass, and also functions as a dielectric.

[0026] In the discharge vessel 11, the long side surfaces 12a, 12b made of long plate gl...

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PUM

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Abstract

An excimer lamp comprises a discharging container provided with a tube having a rectangular section, which can prevent the edge portion from being a broken starting point to cause the discharging container broken. The excimer lamp (10) generates excimer discharge in a discharging space (S) of the discharging container (11), in a section cut parallelly to the end surfaces (14a, 14b), compared withthe edge portions (16a, 16b, 16c, 16d) connected with the long edge surfaces (12a, 12b) and the short edge surfaces (13a, 13b), the central portion (18a, 18b) of the long edge surfaces (12a, 12b) of the discharging container (11) bends toward the inner side of the discharging space (S), the surface exposed in the discharging space (S) of the discharging container (11) is provided with an ultraviolet reflecting film (20), and the film thickness of the ultraviolet reflecting film (20) at the edge portion side is thicker than that of the central portion.

Description

technical field [0001] The present invention relates to an excimer lamp, in which a discharge gas is excited through a pair of electrodes facing a discharge vessel made of silica glass, and the silica glass forming the discharge vessel between the pair of electrodes, An excimer discharge occurs inside the capacitor. Background technique [0002] In recent years, the following technology has been developed and put into practical use: irradiating vacuum ultraviolet light with a wavelength of 200nm or less on the object to be treated made of metal, glass and other materials, thereby detoxifying Treatment of the object to be processed, such as cleaning treatment technology to remove organic pollutants attached to the surface of the object to be processed, or oxide film formation treatment technology to form an oxide film on the surface of the object to be processed. [0003] Among these devices, there is known an excimer lamp that uses light as a light source for irradiating va...

Claims

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Application Information

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IPC IPC(8): H01J65/00H01J61/33H01J61/35
CPCH01J5/50H01J9/247H01J61/305H01J61/35H01J65/046
Inventor 藤泽繁树平石隆之
Owner USHIO DENKI KK
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