Automatic cleaning device and automatic cleaning method
A technology of automatic cleaning and moving devices, applied in the direction of cleaning methods using gas flow, cleaning methods and utensils, chemical instruments and methods, etc., can solve problems such as product yield decline, manufacturing cost increase, and foreign matter is difficult to blow off, and achieve The effect of reducing manufacturing costs and improving product yield
Inactive Publication Date: 2012-04-25
MACRONIX INT CO LTD
View PDF4 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0003] Lead / Mark Scanner is an inspection instrument used in the industry to inspect the appearance of chips. If the glass base (including the stage) used in the inspection has foreign matter residues, such as particles or slag, etc. , in the detection process, the foot position / positive printing scanning machine will misjudge a normal product as a faulty product, resulting in a decrease in product yield and an increase in manufacturing costs.
[0004] Although the original foot position / positive printing scanning machine has an air blowing device, due to the adhesion between the foreign matter and the glass base or the influence of static value, it will make it difficult to blow off these foreign matters
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0065] figure 1 What is shown is a schematic diagram of a dust collection device according to an embodiment of the present invention.
[0066] Please refer to figure 1 , The dust collection device 100 includes an air suction device 102 , a dust suction body 104 , bristles 106 and a moving device 108 . The suction device 102 is, for example, a vacuum pump.
[0067] The suction body 104 is disposed on the mobile device 108 and communicates with the suction device 102 , and has a suction port 110 . In addition, the dust collecting device 100 further includes a dust suction pipeline 112 for communicating with the suction device 102 and the dust suction main body 104 .
[0068] The bristles 106 are arranged on the suction main body 104 along the outline of the suction port 110 to brush foreign matter into the suction port 110 . The material of the bristles 106 is, for example, an antistatic material, which can prevent foreign matter from being adsorbed on the bristles 106 by el...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a dust collecting device, an automatic cleaning device and an automatic cleaning method. The dust collecting device comprises an air evacuating device, a dust suction main body, brush bristles and a move device, wherein the dust suction main body is communicated with the air evacuating device and is provided with a suction port; the brush bristles are arranged on the dust suction main body along the outline of the suction port; and the move device is used for moving the dust suction main body arranged on the move device.
Description
technical field [0001] The present invention relates to a cleaning device and a cleaning method, and in particular to an automatic cleaning device and an automatic cleaning method. Background technique [0002] The manufacture of integrated circuits requires extremely high cleanliness, so that the manufactured integrated circuits can achieve the expected functions and purposes. Under the current technological development of semiconductors, the integration level required by integrated circuits has also been further improved. Therefore, it is very important work to remove fine dust from machines and the like for manufacturing semiconductor elements. [0003] Lead / Mark Scanner is an inspection instrument used in the industry to inspect the appearance of chips. If the glass base (including the stage) used in the inspection has foreign matter residues, such as particles or slag, etc. , in the detection process, the foot position / print scanning machine will misjudge a normal pro...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): B08B5/04B08B13/00
Inventor 林享怡陈世坤郭信麟
Owner MACRONIX INT CO LTD