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Light irradiation device

A technology for a light irradiation device and a reflector, which is applied to lighting devices, components of lighting devices, and damage prevention measures for lighting devices, and can solve problems such as breakage and damage to condenser lenses.

Inactive Publication Date: 2013-05-08
USHIO DENKI KK
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0022] Therefore, it is considered that in this narrow place, when the plate-shaped member that is the partition is buckled and deformed, the deformed plate-shaped member presses the edge of the condenser lens and damages the condenser lens, which may cause damage depending on the situation.

Method used

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Examples

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Embodiment Construction

[0060] figure 1 It is a figure which shows the schematic structure of the light irradiation apparatus of this invention. Additionally, for Figure 9 Those who are the same are given the same symbol.

[0061] and Figure 9 The difference is that a partition wall 20 is provided between the condenser mirrors of the light source composed of a plurality of lamps, and the other configurations are basically the same.

[0062] figure 2 yes means figure 1 A diagram showing the structure of the first embodiment of the partition wall.

[0063] As shown in the figure, the partition wall 20 includes: a plurality of (eight in the figure) elongated rectangular plates (hereinafter referred to as card plates) 21; and two pillars supporting the plurality of card plates 21 at both ends. 22, 23.

[0064] The portion for preventing fragments from reaching the wall surface of the adjacent lamp when the lamp is broken is formed by aligning the longitudinal direction of the card boards latera...

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Abstract

The present invention provides a light irradiation device which is provided with a plurality of lamps and condensers. At a state that a separation wall is provided between two lamps, the separation wall does not generate deformation (buckling) which expands in a direction orthogonal with the plane of the separation wall. The separation wall is provided with a plurality of rectangular plate-shapedcomponents which are aligned in the length direction parallelly and pillars for supporting the plate-shaped components. The plate-shaped components are supported on the pillars with a mode that the extension which is caused by thermal expansion and is in the length direction of the plate-shaped components. The plate-shaped components can be configured transversely or longitudinally. But the plate-shaped components which are aligned in the length direction parallelly are preferably provided with micro clearances between the adjacent plate-shaped components.

Description

technical field [0001] The present invention relates to a light irradiation device used in an exposure device for manufacturing semiconductor elements, printed circuit boards, liquid crystal substrates, etc., and particularly relates to a light irradiation device including a plurality of lamps. Background technique [0002] As a light source used in an exposure device for a semiconductor element, a printed circuit board, or a liquid crystal display substrate, a large ultra-high pressure mercury lamp of several kW to several 10 kW has been mainly used conventionally. These light sources are also highly reliable and have been used for a long time. [0003] In recent years, as liquid crystal display substrates and printed circuit boards have increased in area, the exposure apparatus has been expected to expand the light irradiation area, and the size of the light source for exposure has also been demanded. [0004] As a light irradiation device equipped with a large light sour...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B19/00F21V15/00F21V7/04F21V17/10
CPCG03F7/7005G03F7/70141G03F7/7015G03F7/702G03F7/70233G03F7/70275
Inventor 百地伸元铃木一好铃木航太
Owner USHIO DENKI KK
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