Temperature controlling sample holder capable of adjusting incident ion energy and monitoring ion flux in real time
A technology of real-time monitoring and ion energy, applied in the direction of non-electric variable control, measuring device, temperature control, etc., can solve the problems of complex system, difficult control of sample temperature, and unguaranteed accuracy of plasma parameters, etc., and achieve simple structure , reliable performance
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[0017] A temperature-controlled sample holder that can adjust incident ion energy and monitor ion flux in real time: it has a sample holder base 1, and there is a cavity inside the sample holder base 1, and the cavity communicates with a cooling pipe 8 for cooling medium flow, The cooling pipe 8 is insulated from the sample holder base 1; the upper end of the sample holder base 1 is equipped with a gland 2 with a central opening through bolts, and in the cavity between the gland 2 and the sample holder base 1, the sample holder base A sample insulating sleeve 3 with a central opening is installed above 1, and an annular baffle 4 is installed above the sample insulating sleeve 3. The annular baffle 4 is located between the lower surface of the gland 2 and the upper surface of the sample insulating sleeve 3, and is tightly connected to both. Contact; there is a through hole in the middle of the sample holder base 1, and an armored thermocouple 10 is installed in the through hole,...
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