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Preparation method of zinc selenide with high optical quality
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An optical quality, zinc selenide technology, applied in the direction of binary selenium/tellurium compounds, etc., to avoid the formation of powder, avoid rapid growth, and optimize the effect of space pressure
Active Publication Date: 2012-06-20
GRINM GUOJINGHUI NEW MATERIALS CO LTD +1
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Problems solved by technology
[0005] The chemical vapor deposition process has a narrow process window for ZnSe, and it is easy to generate powder, and inclusions appear inside the material, which significantly reduces the optical quality of the product
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Embodiment 1
[0023] A method for preparing zinc selenide with high optical quality, using a chemical vapor deposition process in a high-temperature deposition furnace, the method steps are:
[0024] (1) Zinc is put into the deposition furnace;
[0025] (2) Vacuum the equipment through a vacuum pump to make the vacuum degree 2×10 4 Pa;
[0026] (3) Raise the temperature of the deposition chamber to 550°C, after the zinc melts and evaporates, continue to heat up to 750°C and keep it warm;
[0027] (4) with argon as the carrier gas of the reaction raw material gas, the H 2 Se gas and argon gas are passed into the deposition chamber, and rise to the set value H after 1 hour 2 Se gas: 1L / min, argon: 10L / min, enter the normal deposition process, zinc and H 2 The molar ratio of Se is 1, the deposition reaction occurs on the inner wall of the deposition chamber, and ZnSe begins to grow;
[0028] (5) Detect the evaporation amount of Zn every one hour (by feedbacking the evaporation amount of Z...
Embodiment 2
[0031] A method for preparing zinc selenide with high optical quality, using a chemical vapor deposition process in a high-temperature deposition furnace, the method steps are:
[0032] (1) Zinc is put into the deposition furnace;
[0033] (2) Vacuum the equipment through a vacuum pump to make the vacuum degree 2.5×10 4 Pa;
[0034] (3) Raise the temperature of the deposition chamber to 600°C, after the zinc melts and evaporates, continue to heat up to 730°C and keep it warm;
[0035] (4) with argon as the carrier gas of the reaction raw material gas, the H 2 Se gas and argon gas are passed into the deposition chamber, and rise to the set value H after 1.5 hours 2 Se gas: 1.2L / min, argon: 15L / min, enter the normal deposition process, zinc and H 2 The molar ratio of Se is 0.8, the deposition reaction occurs on the inner wall of the deposition chamber, and ZnSe begins to grow;
[0036] (5) Detect the evaporation amount of Zn every hour (by feedbacking the evaporation amount...
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Abstract
The invention discloses a preparation method of zinc selenide with high optical quality, which belongs to the technical field of inorganic block body material preparation. The method comprises the following steps: putting zinc into a deposition furnace; pumping the vacuum; raising the temperature in a deposition chamber; using argon as carrying gas of reaction raw material gas; introducing H2Se gas and the argon into the deposition chamber through a mass flowmeter (the mol ratio of zinc to H2Se is between 0.8 and 1.2, the deposition reaction is carried out on the inner wall of the deposition chamber, and the zinc selenide begins to grow); maintaining the unchanged mol ratio of zinc to H2Se and the constant pressure in the furnace; carrying out deposition for 15 to 25 days; and then, lowering the temperature to the room temperature to obtain the zinc selenide with high optical quality. The invention effectively solves the problem of powder generation in the process of preparing the zinc selenide through chemical vapor deposition, the impurities mixed in products are eliminated, the materials have high infrared transmission rate and low absorption factor, and the optical quality is greatly improved.
Description
technical field [0001] The invention belongs to the technical field of preparation of inorganic block materials, in particular to a preparation method of zinc selenide with high optical quality. Background technique [0002] Zinc selenide is an infrared optical material with high transmittance and low absorption coefficient. Its transmission band covers visible light, mid-infrared and far-infrared, and has good mechanical and thermal properties. It is widely used as infrared detection, Windows and lenses of imaging devices. [0003] The chemical vapor deposition process (Chemical Vapor Deposition, CVD for short) prepares ZnSe, uses Zn and H2Se as raw materials, and reacts inside the deposition chamber. The reaction principle: [0004] Zn+H 2 Se→ZnSe+H 2 ↑ [0005] The process window of ZnSe prepared by chemical vapor deposition is narrow, powder is easily generated, and inclusions appear inside the material, which significantly reduces the optical quality of the produ...
Claims
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