Preparation method of zinc selenide with high optical quality
An optical quality, zinc selenide technology, applied in the direction of binary selenium/tellurium compounds, etc., to avoid the formation of powder, avoid rapid growth, and optimize the effect of space pressure
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Embodiment 1
[0023] A method for preparing zinc selenide with high optical quality, using a chemical vapor deposition process in a high-temperature deposition furnace, the method steps are:
[0024] (1) Zinc is put into the deposition furnace;
[0025] (2) Vacuum the equipment through a vacuum pump to make the vacuum degree 2×10 4 Pa;
[0026] (3) Raise the temperature of the deposition chamber to 550°C, after the zinc melts and evaporates, continue to heat up to 750°C and keep it warm;
[0027] (4) with argon as the carrier gas of the reaction raw material gas, the H 2 Se gas and argon gas are passed into the deposition chamber, and rise to the set value H after 1 hour 2 Se gas: 1L / min, argon: 10L / min, enter the normal deposition process, zinc and H 2 The molar ratio of Se is 1, the deposition reaction occurs on the inner wall of the deposition chamber, and ZnSe begins to grow;
[0028] (5) Detect the evaporation amount of Zn every one hour (by feedbacking the evaporation amount of Z...
Embodiment 2
[0031] A method for preparing zinc selenide with high optical quality, using a chemical vapor deposition process in a high-temperature deposition furnace, the method steps are:
[0032] (1) Zinc is put into the deposition furnace;
[0033] (2) Vacuum the equipment through a vacuum pump to make the vacuum degree 2.5×10 4 Pa;
[0034] (3) Raise the temperature of the deposition chamber to 600°C, after the zinc melts and evaporates, continue to heat up to 730°C and keep it warm;
[0035] (4) with argon as the carrier gas of the reaction raw material gas, the H 2 Se gas and argon gas are passed into the deposition chamber, and rise to the set value H after 1.5 hours 2 Se gas: 1.2L / min, argon: 15L / min, enter the normal deposition process, zinc and H 2 The molar ratio of Se is 0.8, the deposition reaction occurs on the inner wall of the deposition chamber, and ZnSe begins to grow;
[0036] (5) Detect the evaporation amount of Zn every hour (by feedbacking the evaporation amount...
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