Bolometer and manufacturing method thereof

A measuring meter and radiant heat technology, which is applied in the field of infrared detectors, can solve problems such as flexible and changeable design structures, and achieve the effects of flexible design, optimized performance, and improved flexibility

Inactive Publication Date: 2010-07-14
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

[0005] The technical problem to be solved in the present invention is to optimize the resistance structure of the thermistor and combine the change of the doping concentration of the thermistor material to solve the problem that the previous bolometer only relied on changing the doping concentration of the thermistor material to make it Meet the performance requirements, so as to achieve the purpose of flexible and changeable design structure

Method used

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  • Bolometer and manufacturing method thereof
  • Bolometer and manufacturing method thereof
  • Bolometer and manufacturing method thereof

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Embodiment Construction

[0022] The present invention will be further described in detail below in conjunction with the drawings.

[0023] See figure 1 , The bolometer provided by the present invention has a traditional bridge structure. The structure includes: a substrate 1, a supporting layer 3 located above the substrate 1, a bottom electrode 4 fabricated on the supporting layer 3, and a bottom electrode 4 There is a thermistor 5, an upper electrode 6 is covered on the thermistor 5, and an absorption layer 7 is prepared on the upper electrode 6, wherein the substrate 1 and the supporting layer 3 are arranged in parallel with a gap, and the upper electrode 6 and the lower electrode 4 are respectively formed by The independent units form an upper electrode unit group and a lower electrode unit group, and a series current path is formed by the thermistor 5 arranged between the upper and lower electrodes. The upper electrode 6 and the lower electrode 4 are arranged at intervals and relatively staggered on...

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Abstract

The invention provides a bolometer and a manufacturing method thereof, particularly relates to a bolometer obtained by changing the structure of thermistors. The structure of the bolometer comprises a base, a support layer positioned above the base, a lower electrode manufactured on the support layer, thermistors manufactured on the lower electrode, an upper electrode covering the thermistors and an absorbing layer prepared on the upper electrode, wherein the base and the support layer are parallel to each other and are arranged at intervals, and the upper electrode, the lower electrode and the thermistors are electrically connected in series. The structural arrangement enabls the resistance value of the thermistors to be adjustable in a large range, optimizes the performances of devices and meets different application requirements, thereby greatly improving the flexibility of design.

Description

Technical field [0001] The invention relates to an infrared detector, in particular to a bolometer obtained by changing the structure of the thermistor. Background technique [0002] The bolometer is a thermistor type detector and one of the most successfully developed infrared detectors. The bolometer detects energy based on the property that the resistance of the thermistor changes under the condition of radiant flux, where the thermistor is generally made of metal or semiconductor materials. When the detector absorbs the infrared radiation power ΔW, it causes the temperature to change ΔT and the resistance of the thermistor ΔR. Use the readout circuit (ROIC) to convert the change of the resistance to the change of voltage or current, and then get the corresponding Infrared radiation power. [0003] Since the US technology was declassified in 1992, the research on bolometers has gone through a stage of rapid development. People have studied bolometers based on various material...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J5/20
Inventor 胥超徐永青
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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