Bolometer and manufacturing method thereof

Abstract

The invention provides a bolometer and a manufacturing method thereof, particularly relates to a bolometer obtained by changing the structure of thermistors. The structure of the bolometer comprises a base, a support layer positioned above the base, a lower electrode manufactured on the support layer, thermistors manufactured on the lower electrode, an upper electrode covering the thermistors and an absorbing layer prepared on the upper electrode, wherein the base and the support layer are parallel to each other and are arranged at intervals, and the upper electrode, the lower electrode and the thermistors are electrically connected in series. The structural arrangement enabls the resistance value of the thermistors to be adjustable in a large range, optimizes the performances of devices and meets different application requirements, thereby greatly improving the flexibility of design.

Description

Technical field

[0001] The invention relates to an infrared detector, in particular to a bolometer obtained by changing the structure of the thermistor. Background technique

[0002] The bolometer is a thermistor type detector and one of the most successfully developed infrared detectors. The bolometer detects energy based on the property that the resistance of the thermistor changes under the condition of radiant flux, where the thermistor is generally made of metal or semiconductor materials. When the detector absorbs the infrared radiation power ΔW, it causes the temperature to change ΔT and the resistance of the thermistor ΔR. Use the readout circuit (ROIC) to convert the change of the resistance to the change of voltage or current, and then get the corresponding Infrared radiation power.

[0003] Since the US technology was declassified in 1992, the research on bolometers has gone through a stage of rapid development. People have studied bolometers based on various material...

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