Method for preparing step standard sample of nano-scale oxide crystalloid with high precision

Abstract

The invention relates to a method for preparing a step standard sample of a nano-scale oxide crystalloid with the high precision, comprising the following steps of: (1) orienting each natural exposing surface of an oxide transistor by using an X-ray orientation device, determining Miller indices of crystal surfaces of each natural exposing surface and selecting one natural exposing surface of the oxide crystalloid as a base plane of the natural exposing surface; (2) cutting the oxide crystalloid in a direction parallel to the base plane of the natural exposing surface to obtain a square oxide crystalloid having the base plane of the natural exposing surface and a cutting exposing surface; and (3) grinding and polishing the cutting exposing surface of the square oxide crystalloid so that the cutting exposing surface is parallel to the base plane of the natural exposing surface, and then searching the step on the base plane of the natural exposing surface of the square oxide crystalloid by using an atomic force microscope to obtain the step standard sample of the nano-scale oxide crystalloid with the high precision. The step height standard sample manufactured by the method has the advantages of favorable stability, wide step height range, simple operation, low cost, high precision and the like.

Description

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AI Technical Summary

Benefits of technology

This invention describes different ways for creating high-quality small particles that can be used in electronic devices or other applications such as catalysts. These tiny objects show great promise due their unique shape, size ranges, and stable properties over time.

Problems solved by technology

This patented technical problem addressed in this patents relates to improving the precision and reproducibility of measuring small dimensions accurately at submicrons levels over large distances. Current techniques involve expensive instrumentations like X-ray fluorescence spectroscopy and electron beam probes, but they cannot achieve required specific values due to instability caused by environmental factors during manufacture. To address this issue, researchers developed new ways called Surface Scan Calibrator Standard Sets (SCFS). These tools include silane films made up mostly of hydrogen atoms bonded together through strong bonds between them, resulting in improved stability compared to previous methods involving organics. Additionally, there was an attempt to create minute terraces instead of traditional step plugs based upon oxynaphthene patterns formed inside the wafer's surface. By doing this, the size of each step becomes larger without compromising its reliability. Overall, these improvements aim to improve the performance and quality control of nanoposition measurements while maintaining cost efficiency.

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