High-speed multistage turbine vacuum pump and evacuation method thereof
A vacuum pump, high-speed technology, applied in the field of high-speed turbo vacuum pump, can solve the problems of too many devices, complicated pipeline connections, use restrictions, etc., and achieve the effects of reasonable structure, reduced energy consumption, and high reliability
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[0025]High-speed multi-stage turbo vacuum pump, the output end of the drive motor 1 is connected to the gear speed-up box 3 through the flexible motor coupling 2, the gear speed-up box 3 adopts a single-stage speed-up, and its output end is through the flexible main shaft coupling 21 is connected to the front end of the main shaft 4, the rotating speed of the main shaft 4 is above 5000r / min, the main shaft 4 passes through the radial sliding bearings 14, 14a, oil seals 15a, 15 installed in the front bearing housing 5 and the rear bearing housing 5a installed at both ends of the casing 16 The support suspension is in the casing 16 and is in sealing and rotational cooperation with the casing 16 . In order to facilitate maintenance and installation, the casing 16 adopts a horizontal split structure, which is composed of an upper casing 16a and a lower casing 16b. The shaft end seals 11a and 11 are arranged to seal and cooperate with the main shaft 4; the front bearing seat 5 and ...
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