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Electrical fuse and relevant control circuit thereof

A technology for electronic fuses and control circuits, applied in circuits, electrical components, electric solid devices, etc., can solve problems such as incomplete opening of electronic fuses, and achieve the effect of reducing the probability of occurrence

Inactive Publication Date: 2010-09-08
MSTAR SOFTWARE R&D (SHENZHEN) LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] The technical problem to be solved by the present invention is to provide an electronic fuse and its related control circuit, which can effectively solve the problem that the existing electronic fuse produces an incomplete open state

Method used

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  • Electrical fuse and relevant control circuit thereof
  • Electrical fuse and relevant control circuit thereof
  • Electrical fuse and relevant control circuit thereof

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Embodiment Construction

[0030] The manufacturing process of the electronic fuse of the present invention can be manufactured separately from the manufacturing process of the MOS transistor gate or simultaneously. Please refer to FIG. 3(a), which is an electronic fuse according to a specific embodiment of the present invention. The e-fuse includes a stacked lightly doped (Lightly Doped) or undoped (Un-doped) polysilicon layer 130 and a metal silicide layer 135. Furthermore, the thickness of the low-doped or undoped polysilicon layer 130 is about 1K-2K angstroms, and its resistance value is 20K-50K ohms / unit area (ohms / square); and the thickness of the metal silicide layer 135 is about 200 ~300 Angstroms, and its resistance value is 5-20 ohms / unit area.

[0031] When the electronic fuse is completed, it is in the closed state as shown in Figure 3(a). As shown in Figure 3(b), which is a schematic diagram of the open state of the electronic fuse of the present invention. According to the embodiment of th...

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Abstract

The invention discloses an electrical fuse and a relevant control circuit thereof, which can effectively solve the problem that the traditional electrical fuse can be opened incompletely. The electrical fuse is provided with a polycrystalline silicone layer, and a metal silicide layer is stacked on the polycrystalline silicone layer. When the metal silicide layer is burnt out and the polycrystalline silicone layer is not burnt out, the electrical fuse is in an open state.

Description

Technical field [0001] The invention relates to an electronic fuse (e-fuse), especially an electronic fuse and its related control circuit. Background technique [0002] Generally speaking, e-fuse and metal-oxide semiconductor transistor (Metal-Oxide-Semiconductor transistor, hereinafter referred to as MOS transistor) have the same gate process. Therefore, in the process of integrated circuit manufacturing, electronic The fuse and the gate of the MOS transistor will be made at the same time. [0003] Please refer to Figure 1(a) to Figure 1(d) , Which is a schematic diagram of the existing e-fuse and MOS transistor gate manufacturing process. As shown in Figure 1(a), an insulating layer 20 is formed on the semiconductor substrate 10. The material of the insulating layer 20 is usually silicon dioxide (SiO 2 ). The left side of the dotted line is the MOS transistor area, and the right side of the dotted line is the non-MOS transistor area. [0004] As shown in FIG. 1( b ), a highly d...

Claims

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Application Information

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IPC IPC(8): H01L23/525H01L27/06H01L21/20H01L29/78
Inventor 刘志纲林敬伟谢敏男
Owner MSTAR SOFTWARE R&D (SHENZHEN) LTD