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Preparation method of multilayer composite modified layer with strong toughness on titanium alloy surface

A multi-layer composite and titanium alloy technology, which is applied in metal material coating process, coating, ion implantation plating, etc., can solve the problem of unsatisfactory titanium alloy surface modification layer, achieve high bonding strength and ensure use Long-lasting, good wear-resistant effect

Inactive Publication Date: 2012-11-14
TAIYUAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, under the wear condition of high contact load, the unilateral pursuit of high strength of the titanium alloy surface modification layer cannot achieve satisfactory results, and the toughness of the modified layer should also be paid attention to.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0019] (1) Put the titanium alloy TC4 workpiece into a double-layer glow ionization metallization furnace as a substrate, and use a pure Mo plate as a sputtering target. The vacuum chamber is evacuated to below 5Pa, and under the condition of only flowing argon gas, a Mo bottom layer with a thickness of about 4 μm is first permeated on the surface of the workpiece. The process parameters are: the distance between the workpiece and the Mo target is 16cm; the air pressure is 40Pa; the target voltage is 1060V; the workpiece voltage is 520V; the workpiece temperature is 900°C;

[0020] (2) Then argon and nitrogen are introduced at the same time, and a Mo-N layer with a thickness of about 2 μm is continued to be deposited on the surface of the workpiece. The process parameters are: the distance between the workpiece and the Mo target is 16cm; the flow ratio of argon and nitrogen is 1:1, and the pressure in the furnace is 40Pa; the target voltage is 1140V; the workpiece voltage is 4...

Embodiment approach 2

[0025] (1) Put the titanium alloy TC11 workpiece into a double-layer glow ionization metallization furnace as a substrate, and use a pure Mo plate as a sputtering target. The vacuum chamber is evacuated to below 5Pa, and under the condition of only flowing argon gas, a Mo bottom layer with a thickness of about 6 μm is first permeated on the surface of the workpiece. The process parameters are: the distance between the workpiece and the Mo target is 15cm; the air pressure is 35Pa; the target voltage is 1100V; the workpiece voltage is 510V; the workpiece temperature is 900°C;

[0026] (2) Then argon gas and nitrogen gas are introduced at the same time, and a Mo-N layer with a thickness of about 3 μm is continued to be deposited on the surface of the workpiece. The process parameters are: the distance between the workpiece and the Mo target is 15cm; the flow ratio of argon and nitrogen is 2:1, and the pressure in the furnace is 35Pa; the target voltage is 1150V; the workpiece vol...

Embodiment approach 3

[0031](1) Put the pure titanium TA2 workpiece into the double-layer glow ion metallization furnace as the substrate, and use the pure Mo plate as the sputtering target. The vacuum chamber is evacuated to below 5Pa, and under the condition of only flowing argon gas, a Mo bottom layer with a thickness of about 4 μm is first permeated on the surface of the workpiece. The process parameters are: the distance between the workpiece and the Mo target is 16cm; the air pressure is 40Pa; the target voltage is 1020V; the workpiece voltage is 480V; the workpiece temperature is 800°C;

[0032] (2) Then argon and nitrogen are introduced at the same time, and a Mo-N layer with a thickness of about 2 μm is continued to be deposited on the surface of the workpiece. The process parameters are as follows: the distance between the workpiece and the Mo target is 16cm; the flow ratio of argon and nitrogen is 1:2, and the pressure in the furnace is 40Pa; the target voltage is 1100V; the workpiece vo...

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Abstract

The invention relates to a preparation method of a multilayer composite modified layer with strong toughness on a titanium alloy surface, which belongs to the technical field of the surface modification and strengthening of metal materials. The invention is characterized by adopting a technical scheme that the unit diffusion of Mo and co-diffusion of Mo / N are alternately and cyclically carried out on the surface of a titanium alloy substrate to prepare the Mo / MoN multilayer composite modified layer with strong toughness. The preparation method comprises the following steps of coating a Mo bottom layer with the thickness thereof 4-6 mu m by diffusion on the surface of a workpiece firstly; then simultaneously introducing argon and nitrogen and coating a MoN layer with the thickness thereof 2-4 mu m by diffusion on the surface of the workpiece; cutting off the nitrogen supply, only introducing argon into a vacuum chamber, and continuing to coating a Mo layer with the thickness of 2-4 mu m by diffusion on the surface of the workpiece; by turning on and cutting off the nitrogen supply, continuing to alternately and cyclically coating MoN layers and Mo layers by diffusion on the surface of the workpiece, and enabling the most superficial layer of the multilayer composite layer to be the MoN layer to prepare the Mo / MoN multilayer composite layer with the modulation period of 2-4 mu m and the total thickness of 10-50 mu m; and taking out the workpiece after the workpiece cools in a furnace to the room temperature. The prepared Mo / MoN multilayer composite modified layer obviously improves the wear resistance of the titanium alloy under the high contact load condition.

Description

technical field [0001] The preparation method of the toughness and toughness multilayer composite modified layer on the surface of the titanium alloy of the present invention belongs to the technical field of metal material surface modification and strengthening, and particularly relates to a method for preparing Mo / Mo-N multilayer with high bonding strength and toughness on the titanium alloy substrate. A method of layer-by-layer composite modification. Background technique [0002] Titanium alloy has the characteristics of high specific strength, good thermal stability, and excellent corrosion resistance. It is used in aerospace, chemical industry, biomedicine, automobile manufacturing, sporting goods and other fields. However, the wear resistance of titanium alloy is poor, which affects the safety and reliability of titanium alloy components and limits its application range. The use of surface engineering technology to form a modified layer on the surface of titanium all...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/00C23C14/16C23C14/06
Inventor 李秀燕张莹杨慧岩唐宾
Owner TAIYUAN UNIV OF TECH
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