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Heat insulating cage and ingot casting furnace with same

A heat insulation cage and ingot furnace technology, applied in the field of ingot furnaces, can solve problems such as low heat reflectivity and heat waste, and achieve the effects of improving heat reflectivity, reducing production costs, and reducing thermal power consumption

Inactive Publication Date: 2010-11-17
王敬
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of this, the purpose of the present invention is to at least solve one of the above-mentioned technical defects, especially to solve the problem of heat waste caused by the low heat reflectivity of heat insulation cage materials in the growth process of semiconductor materials such as polycrystalline silicon

Method used

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  • Heat insulating cage and ingot casting furnace with same
  • Heat insulating cage and ingot casting furnace with same
  • Heat insulating cage and ingot casting furnace with same

Examples

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Embodiment Construction

[0024] The heat insulation cage usually used for polycrystalline furnaces includes a top plate and a side plate. The top plate is composed of a carbon-carbon composite material matrix and an insulation layer. The insulation layer can be located inside or outside the matrix; the side plate is mainly composed of The insulation layer is formed, of course, the side panels can also have a multi-layer structure, for example, they can have the same structure as the top panel. For the sake of simplicity, in the present invention, the inside of the roof and / or side panels of the heat insulation cage is collectively referred to as "inner layer", and the outside is collectively referred to as "outer layer". It is also referred to as the "inner layer" in this case. It should be noted that the present invention can be applied regardless of whether the heat-insulation layer of the top plate is located inside or outside the base body, and whether the side plate is a single-layer or multi-lay...

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Abstract

The invention discloses a heat insulating cage for a polycrystalline ingot casting furnace, comprising a top plate and a side plate. The heat insulating cage is characterized in that a heat reflecting layer is formed on the inner side of an inner layer of the top plate and / or the side plate, wherein the heat reflecting layer is made of materials which has the characteristic that the reflecting quantity of the heat radiated to the heat reflecting layer is higher than the reflecting quantity of the heat radiated to the inner layer of the top plate and / or the side plate. The heat insulating cage can effectively reflect the heat quantity radiated to the heat insulating cage back to the inner part of the ingot casting furnace, thereby solving the problem of heat waste to a certain degree and reducing heat power consumption. The invention further discloses an ingot casting furnace with the heat insulating cage.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a heat insulation cage used in a polycrystalline material ingot casting furnace and an ingot casting furnace using the heat insulation cage. Background technique [0002] In the production process of polysilicon wafers for solar cells, a polysilicon ingot furnace is usually used to directional solidify the silicon melt to form silicon ingots. [0003] The existing ingot casting furnace generally includes: an upper furnace body; a lower furnace body, the lower furnace body matches with the upper furnace body and is movable longitudinally; a supporting device arranged in the lower furnace body, on which the supporting device A crucible is provided; a heat shield arranged at the open end of the crucible, the center of the heat shield is provided with a gas introduction hole; at least one heater is used for closing the lower furnace body and the upper furnace body...

Claims

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Application Information

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IPC IPC(8): C30B28/06C30B29/06
Inventor 王敬
Owner 王敬
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