Device and method for measuring modulation transfer function of large-numerical aperture micro objective

A technique of modulating transfer function and microscope objective lens, which is applied in the direction of testing optical performance, etc., to achieve the effects of good function expansion, wide working band and simple structure

Inactive Publication Date: 2010-11-24
SUZHOU UNIV
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Problems solved by technology

When using this instrument to measure large numerical aperture microscopic objectives, there is also the problem that a relay lens with a larger numerical aperture needs to be used

Method used

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  • Device and method for measuring modulation transfer function of large-numerical aperture micro objective
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  • Device and method for measuring modulation transfer function of large-numerical aperture micro objective

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Embodiment 1

[0030] See attached figure 1 , it is the structural representation of the large numerical aperture microscopic objective lens modulation transfer function measuring device that the present embodiment provides, and this device comprises: collimating objective lens 1, target generator 2, image analyzer 11 and control and data processing system (computer) 14.

[0031] The target generator 2 is used to provide a specific imaging target for the test of the modulation transfer function of the microscope objective lens, which includes a target 3 , a chopper 4 , a filter 5 and an illumination source 6 . Wherein the target 3 is a slit target, which is placed at the focal point of the collimating objective lens 1 for simulating a target located at infinity. The illumination light source 6 is used to illuminate the target, and the output wavelength of the target generator can be changed by changing different filters. The chopper is used to modulate the optical radiation signal emitted ...

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Abstract

The invention relates to a technology for measuring the modulation transfer function of an optical system, in particular to a device and method for measuring the modulation transfer function of a large-numerical aperture micro objective. An image analyzer (11) of the device comprises a scanning knife edge (8), a scanning controller (9), an integrating sphere (10), a semiconductor photoelectric detector (12) and a phase-locking amplifier (13), wherein the scanning knife edge (8) is installed in front of the opening of the integrating sphere (10); the scanning controller (9) receives control signals sent by a control and data processing system (14) to drive the knife edge to move; and the semiconductor photoelectric detector (12) is installed on the inner wall of the integrating sphere (10), and current signals output by the semiconductor photoelectric detector (12) are processed by the phase-locking amplifier (13) and then input to the control and data processing system (14). The device has the advantages of simple structure, good function expansibility, wide working waveband and convenient use and can also be used for measuring the modulation transfer function of the optical system.

Description

technical field [0001] The invention relates to a technology for measuring the modulation transfer function of an optical system, in particular to a device and method for measuring the modulation transfer function of a large numerical aperture microscopic objective lens. Background technique [0002] Microscopic measuring instruments are an important means for people to understand the microscopic world. With the continuous development of science and technology, people have higher and higher requirements for the resolving power of microscopic measuring instruments. For the optical microscope system, in order to improve the resolving power, it is necessary to design and develop a microscope objective lens with a large numerical aperture (N.A.>0.7). However, the design of large numerical aperture microscopic objectives is difficult and requires high processing and assembly precision. Therefore, in order to ensure the performance of the final product, it is necessary to quant...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M11/02
Inventor 陈新华陈宇恒周建康相春昌范纪铭季轶群沈为民
Owner SUZHOU UNIV
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