Liquid discharge head manufacturing method
A liquid discharge head and photosensitive resin technology, applied in printing and other directions, can solve the problems of not being able to provide, affecting the discharge performance of the inkjet recording head, etc., and achieve a highly repeatable effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
no. 1 example
[0034] Figures 12A-12H and Figures 13A-13C is a diagram showing an example of a method of manufacturing an inkjet head according to the present invention. These figures are similar to those taken along the line B-B' figure 1 The schematic cross-sectional view of the inkjet head in .
[0035] First, if Figure 12A As shown, a substrate 1 including an energy generating element 2 generating energy for discharging liquid is provided. Examples of the energy generating element 2 include heaters and piezoelectric elements. For the substrate 1, silicon was used. In order to enhance the durability of the energy generating element 2, various types of functional layers such as a protective layer (not shown) may be provided. For example, a film of SiN, SiC and / or Ta may be provided on the surface of the substrate.
[0036] Then, if Figure 12BAs shown, a first layer 22 including a positive photosensitive resin for forming a pattern having a shape of a flow path is formed on a s...
no. 2 example
[0060] Below, refer to as along figure 1 A schematic cross-sectional view taken on the line A-A' of the inkjet head in Figures 15A-15D with Figures 16A-16H A second embodiment of the present invention is described.
[0061] First, set up such as in e.g. Figure 15A The substrate shown in Substrate 1. For this substrate, although any substrate that can be used as a part of the ink flow path forming member and also as a support for the material layer forming the ink flow path and the ink discharge port can be used without specific limitations on the shape, material, etc. , however, silicon substrates are generally used.
[0062] Then, as shown in FIG. 115B , the first layer 22 containing a positive photosensitive resin is formed on the substrate 1 . The first layer 22 containing a positive photosensitive resin can be provided according to a method similar to that of the first embodiment.
[0063] Then, if Figure 15C As shown, on the first layer 22 is formed a resin comp...
no. 3 example
[0078] Figure 2A-2E , Figure 3A-3D , Figures 4A-4D , Figures 5A-5D with Figures 6A-6B is a diagram showing an example of a method of manufacturing an inkjet head according to the present invention. These figures are similar to those taken along the line A-A' figure 1 The schematic cross-sectional view of the inkjet head in . and, Figure 2A-2E , Figure 3A-3D , Figures 4A-4D , Figures 5A-5D with Figures 6A-6B The illustrated method is an example of forming an ink flow path having a change in the height direction by a stencil pattern having a two-layer configuration in which the shapes of the upper layer and the lower layer are different from each other. Hereinafter, this type of ink flow path is referred to as "an ink flow path having a two-layer configuration".
[0079] First, if Figure 2A As shown, the substrate 1 is provided as in the second embodiment.
[0080] Then, if Figure 2B As shown, a first positive photosensitive resin layer 7 is formed on ...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More