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Pulse stretcher with reduced energy density on optical components

A technology of expanders and optical components, applied in the direction of optical components, optics, instruments, etc., can solve the problem of destroying mirrors and so on

Active Publication Date: 2010-12-01
ASML HLDG NV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

If the folded mirror is too close to the intermediate focus, which is likely when maximizing pulse stretcher delay and using available space, unacceptably high radiation can destroy the mirror

Method used

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  • Pulse stretcher with reduced energy density on optical components
  • Pulse stretcher with reduced energy density on optical components
  • Pulse stretcher with reduced energy density on optical components

Examples

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Embodiment Construction

[0028] The disclosed embodiments are merely exemplary of the invention. The scope of the invention is not limited to the disclosed embodiments. The invention is defined by the appended claims.

[0029] The described embodiments and references in the specification to "one embodiment", "an embodiment", "exemplary embodiment" and the like mean that the described embodiments may include particular features, structures or characteristics, however, each embodiment It may not be necessary to include specific features, structures or characteristics. Also, these paragraphs are not necessarily referring to the same embodiment. Furthermore, when a particular feature, structure, or characteristic is described in conjunction with an embodiment, it should be understood that it is within the knowledge of those skilled in the art, whether explicitly described or not, to implement such feature in combination with other embodiments. , structure or characteristic.

[0030]Embodiments of the ...

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Abstract

A pulse stretcher includes a beam splitter configured to split an input light beam into first and second beams, a con-focal resonator including first and second con-focal mirrors, and a fold mirror. The beam splitter, con-focal resonator, and fold mirror are optically arranged such that at least a portion of the first beam is recombined with the second beam into a modified beam after an optical delay of the first beam caused by the optical arrangement. The apparatus further includes one or more optical elements in an optical path of the input light beam prior to the beam splitter such that a focal point of the first beam is foamed at a distance away from the fold mirror preventing energy density-related damage to the fold mirror. The apparatus can further include one or more additional optical elements to provide re-conditioning of the modified beam. A related method is also disclosed.

Description

technical field [0001] The present invention relates to systems and methods for optical pulse stretching. Background technique [0002] A lithographic apparatus is a machine that applies a desired pattern to a substrate, usually a target portion of the substrate. For example, lithographic equipment may be used in the manufacture of integrated circuits (ICs). In this case, a patterning device, alternatively referred to as a mask or reticle, may be used to generate the circuit pattern to be formed on the individual layers of the IC. The pattern can be transferred onto a target portion (eg, comprising a portion, one or more dies) on a substrate (eg, a silicon wafer). Typically, the pattern is transferred by imaging the pattern onto a layer of radiation sensitive material (resist) provided on the substrate. Typically, a single substrate will contain a network of adjacent target portions that are successively patterned. Known lithographic apparatuses include: so-called steppe...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/20G02B27/00
CPCG02B17/0605G02B13/143G02B27/0955G03F7/7055H01L21/0275
Inventor A·M·温卡塔拉曼J·路德尼
Owner ASML HLDG NV
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