Cleanroom system and cleanroom air-conditioning method

Abstract

The invention provides a cleanroom system comprising a cleanroom, a high-pressure water mist humidifier and an air conditioning device, wherein the cleanroom comprises a clean air chamber zone and an air return zone arranged on the periphery of the clean air chamber zone, the clean air chamber zone is provided with an air inlet and an air outlet, and the air return zone is communicated with the clean air chamber zone by the air inlet and the air outlet; and the high-pressure water mist humidifier is arranged in the air return zone. The air conditioning device comprises an air conditioning chamber and a thermostat, wherein the air conditioning chamber is communicated with the air return zone and is suitable to provide first air flow which flows through the inner part of the air conditioning chamber to enter the air return zone; the thermostat is used for regulating the temperature of the first air flow; second air flow enters the air return zone after leaving the clean air chamber zone from the air outlet, is humidified and cooled by the high-pressure water mist humidifier in the air return zone and is combined with the first air flow to form third air flow; and the third air flow enters the clean air chamber zone from the air inlet. In addition, the invention also provides a cleanroom air-conditioning method.

Description

technical field [0001] The present invention relates to a workplace system and a workplace air conditioning method, and in particular to a clean room system and a clean room air conditioning method. Background technique [0002] In industries or laboratories such as semiconductor and electronics factories, product production or test equipment is generally installed in a clean room, so that the product or test results will not be affected by impurities or dust in the air. Therefore, the environment inside the clean room must be strictly controlled, such as temperature and humidity must be maintained within a certain range. [0003] See figure 1 , an existing clean room system 10 includes a clean room 12 , an air conditioner 14 , a cooling device 16 and a plurality of fan filter units 18 . The clean room 12 includes a clean air room area 122 and a return air area 124 located around the clean air room area 122 . The clean air chamber area 122 has a plurality of air inlets 12...

AI Technical Summary

Problems solved by technology

[0009] However, in the above-mentioned clean room system 10, the temperature adjustment device 143 includes two coils 145, 146, so the temperature adjustment device 143 has many components and the cost is relatively high.

In addition, the water-washing humidifier 144, the first coil 145 and the second coil 146 are arranged in the air-conditioning room 142, so the volume of the air-conditioning device 14 is relatively large.

In addition, the second airflow S2 completely passes through the cooling device 16 to achieve cooling, and the cooling device 16 has a heavy workload and consumes a lot of energy.

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