Method for determining acceleration factors in EM testing structure

Abstract

The invention discloses a method for determining acceleration factors in an EM test structure. The method comprises the following steps: measuring the resistance temperature coefficient of the EM test structure by adopting current which cannot cause Joule heat on the EM structure in a furnace temperature rising process; 2, accelerating current in the condition of at least three groups of current after the furnace is heated to a preset temperature, wherein at least two groups ensure that the EM test structure generates different Joule heats, and measuring the resistance value of the EM test structure under the condition of different currents; 3, calculating the actual temperature of the EM test structure under the condition of different currents according to the resistance temperature coefficient an the resistance value; 4, performing EM experiment, and acquiring the center life of each group under the experimental condition after the experiment is completed; and 5, calculating the acceleration factors according to a black equation by using the actual temperature value and the current condition of the EM test structure and the center life. The method can reduce the cost for measuring two acceleration factors Ea and N of the EM test structure, and improves the production efficiency.

Description

technical field [0001] The invention relates to the field of semiconductor integrated circuit testing, in particular to a method for determining an acceleration factor in an EM testing structure. Background technique [0002] Ea and N are temperature activation energy and current acceleration factor of the EM (EM: Electro-Migration, electromigration) test structure, respectively. Corresponding to different processes, different structures or different materials, the temperature activation energy Ea and the current acceleration factor N will be different. Therefore, for new processes, new structures or new materials, Ea and N must be re-deduced in order to more accurately derive the service life of the EM test structure. [0003] The traditional method to obtain the two acceleration factors of the EM test structure is the 3J3T experiment (refer to "Joint Electronic Device Engineering Committee Standard", 1998.2, "Standard Method for Calculating Current Density and Temperature...

AI Technical Summary

Problems solved by technology

Although this method solves the deviation caused by Joule heat in the push-N experiment of the traditional method, it is cumbersome to operate and still takes up more experimental resources (because this method is based on the traditional method, it still needs to use at least 3 (times) Ea and N can only be deduced from the furnace chamber and 5 sets of experiments

Images