Sputter and sputtering method for manufacturing thin film solar cell
A technology of solar cells and sputtering machines, applied in sputtering coating, final product manufacturing, sustainable manufacturing/processing, etc., can solve the problems of high production cost and large volume of sputtering machines
Inactive Publication Date: 2012-11-07
JI FU ENERGY EQUIP LTD
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Problems solved by technology
[0005] In view of this, the present invention proposes a low-cost sputtering machine and a sputtering method for the manufacture of thin-film solar cells, which solve the problems of huge volume and high production costs of the sputtering machine
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[0027] While the invention will be fully described with reference to the accompanying drawings containing preferred embodiments of the invention, it is before this description that it is understood that those skilled in the art may modify the invention described herein while obtaining the benefits of the invention. Therefore, it should be understood that the above description is a broad disclosure for those skilled in the art, and its content is not intended to limit the present invention.
[0028] see figure 1 and figure 2 , are a plan view and a side view respectively showing a low-cost sputtering machine 1 for thin-film solar cell manufacturing according to the present invention. In this one preferred embodiment, the low-cost sputtering machine 1 that the present invention is used for thin-film solar cell manufacture comprises a cavity 2, has a sputtering space 3; In the injection space 3; a substrate 5 is carried on the carrier 4, and the carrier 4 is used to transport ...
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The embodiment of the invention provides a low-cost sputter and a sputtering method for manufacturing a thin film solar cell. The sputter comprises a cavity, a carrier, a substrate, at least one transmission device and a target material, wherein the cavity is provided with a sputtering space; the carrier is arranged in the sputtering space of the cavity; the substrate is carried on the carrier; the carrier is used for conveying the substrate; the transmission device is arranged on a side edge of the carrier and positioned in the sputtering space of the cavity; the target material is connectedwith the transmission device; and the target material and the transmission device move relative to each other, so that the target material can move horizontally on the surface of the substrate. The low-cost sputter for manufacturing the thin film solar cell has the advantages that: the low-cost sputter and the sputtering method can be used for effectively forming a coating film on the surface of the substrate; and the sputter can convey the substrate for sputtering the target material without a large-size and long-travel carrier, so that the size of the sputter is reduced and production cost is lowered.
Description
technical field [0001] The invention relates to a low-cost sputtering machine and a sputtering method, in particular to a low-cost sputtering machine and a sputtering method for manufacturing thin-film solar cells. Background technique [0002] Thin-film solar cells, as the name suggests, are thin films that can generate photoelectric effects formed on plastic, glass or metal substrates, with a thickness of only a few μm. Therefore, the amount of raw materials can be greatly reduced compared with silicon wafer solar cells with the same light-receiving area. Thin-film solar cells are not a new concept product. In fact, high-conversion-efficiency thin-film solar panels made of gallium arsenide (GaAs) have been widely used in the past (monocrystalline silicon is used as the substrate, and the conversion efficiency is above 30%). to generate electricity. Thin-film solar cells can be mass-produced on cheap glass, plastic or stainless steel substrates to produce large-area solar ...
Claims
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IPC IPC(8): H01L31/18C23C14/34C23C14/50
CPCY02P70/50
Inventor 张一熙李家娴李冠颉
Owner JI FU ENERGY EQUIP LTD