Battery silicon wafer detection system
A detection system and battery silicon wafer technology, applied in the field of detection systems, can solve the problems of increased probability, detection time, cost, inability to detect, and sort, etc., and achieve the effect of easy operation
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[0028] figure 1 It is a three-dimensional structural schematic diagram of the battery silicon wafer inspection system according to the present invention. From right to left in the figure, along the silicon wafer conveyor belt, there are feeding area, exposure area, inspection waiting area, and sorting area. The feeding area includes the feeding area Box 1 and manipulator 2, the front panel 11 of the two loading boxes 1 can be opened around the shaft at the bottom of the loading box 1, and the silicon wafer can be placed in the loading box 1 by hand, and the manipulator 2 picks up the silicon wafer through the suction cup 21 and Put it on the conveyor belt 3, and the silicon wafer is known by the electric control and UI after being placed on the conveyor belt 3, and the silicon wafer is transported to the exposure area by the conveyor belt 3.
[0029] An imaging system is provided on the exposure area, and the imaging system is an imaging lens 4, and an electroluminescence limi...
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